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1. (WO2018166620) APPARATUS FOR VACUUM PROCESSING OF A SUBSTRATE, SYSTEM FOR THE MANUFACTURE OF DEVICES HAVING ORGANIC MATERIALS, AND METHOD FOR SEALING AN OPENING CONNECTING TWO PRESSURE REGIONS

Pub. No.:    WO/2018/166620    International Application No.:    PCT/EP2017/056379
Publication Date: Fri Sep 21 01:59:59 CEST 2018 International Filing Date: Sat Mar 18 00:59:59 CET 2017
IPC: C23C 14/56
B01J 3/00
C23C 16/44
F16K 51/02
F16K 3/00
F16K 31/00
Applicants: APPLIED MATERIALS, INC.
ZANG, Sebastian Gunther
SAUER, Andreas
Inventors: ZANG, Sebastian Gunther
SAUER, Andreas
Title: APPARATUS FOR VACUUM PROCESSING OF A SUBSTRATE, SYSTEM FOR THE MANUFACTURE OF DEVICES HAVING ORGANIC MATERIALS, AND METHOD FOR SEALING AN OPENING CONNECTING TWO PRESSURE REGIONS
Abstract:
The present disclosure provides an apparatus (100) for vacuum processing of a substrate (10). The apparatus (100) includes a first vacuum region (110), a second vacuum region (120), an opening (130) between the first vacuum region (100) and the second vacuum region (130), and a closing arrangement (140) for closing the opening (130). The closing arrangement includes one or more first permanent magnets, one or more second permanent magnets, and a magnet device configured to change a magnetization of the one or more first permanent magnets.