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1. (WO2018166616) CARRIER, VACUUM SYSTEM AND METHOD OF OPERATING A VACUUM SYSTEM

Pub. No.:    WO/2018/166616    International Application No.:    PCT/EP2017/056369
Publication Date: Fri Sep 21 01:59:59 CEST 2018 International Filing Date: Sat Mar 18 00:59:59 CET 2017
IPC: C23C 14/04
H01F 7/02
B23Q 3/154
H01L 21/677
Applicants: APPLIED MATERIALS, INC.
ZANG, Sebastian Gunther
SAUER, Andreas
Inventors: ZANG, Sebastian Gunther
SAUER, Andreas
Title: CARRIER, VACUUM SYSTEM AND METHOD OF OPERATING A VACUUM SYSTEM
Abstract:
A carrier (20) for use in a vacuum system is described. The carrier (20) includes: a magnet arrangement (30) including one or more first permanent magnets (32); one or more second permanent magnets (34); and a magnet device (36) configured to change a magnetization of the one or more first permanent magnets. The carrier may be used for carrying a mask device or a substrate in the vacuum system. Further, a vacuum system (200) and a method of operating a vacuum system are described.