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1. (WO2018166024) METHOD FOR MANUFACTURING TFT AND METHOD FOR MANUFACTURING ARRAY SUBSTRATE

Pub. No.:    WO/2018/166024    International Application No.:    PCT/CN2017/080406
Publication Date: Fri Sep 21 01:59:59 CEST 2018 International Filing Date: Fri Apr 14 01:59:59 CEST 2017
IPC: H01L 21/336
H01L 21/28
H01L 29/786
H01L 21/77
H01L 27/12
Applicants: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
深圳市华星光电技术有限公司
Inventors: CAI, Xiaolong
蔡小龙
Title: METHOD FOR MANUFACTURING TFT AND METHOD FOR MANUFACTURING ARRAY SUBSTRATE
Abstract:
A method for manufacturing a TFT and a method for manufacturing an array substrate. The method comprises: forming, on a base substrate (20), transfer layers (212) that are provided alternately at intervals; forming, on the transfer layers, a metal layer (22) covering the base substrate; and carrying out a DIW demoulding process on the transfer layers, so as to strip the transfer layers and the metal layer above same from the base substrate, and keeping the metal layer, not provided above the transfer layers, on the base substrate, so as to form a metal electrode (23) of the TFT.