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1. (WO2018164017) PRODUCTION METHOD FOR CURED PRODUCT PATTERN, PRODUCTION METHOD FOR OPTICAL COMPONENT, CIRCUIT BOARD AND QUARTZ MOLD REPLICA, AND IMPRINT PRETREATMENT COATING MATERIAL AND CURED PRODUCT THEREOF
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Pub. No.: WO/2018/164017 International Application No.: PCT/JP2018/008158
Publication Date: 13.09.2018 International Filing Date: 02.03.2018
IPC:
H01L 21/027 (2006.01) ,B29C 59/02 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
02
Manufacture or treatment of semiconductor devices or of parts thereof
027
Making masks on semiconductor bodies for further photolithographic processing, not provided for in group H01L21/18 or H01L21/34165
B PERFORMING OPERATIONS; TRANSPORTING
29
WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
C
SHAPING OR JOINING OF PLASTICS; SHAPING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL; AFTER- TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
59
Surface shaping, e.g. embossing; Apparatus therefor
02
by mechanical means, e.g. pressing
Applicants:
キヤノン株式会社 CANON KABUSHIKI KAISHA [JP/JP]; 東京都大田区下丸子3丁目30番2号 30-2, Shimomaruko 3-chome, Ohta-ku, Tokyo 1468501, JP
Inventors:
加藤 順 KATO Jun; JP
伊藤 俊樹 ITO Toshiki; JP
Agent:
岡部 讓 OKABE Yuzuru; JP
齋藤 正巳 SAITO Masami; JP
Priority Data:
62/468,46208.03.2017US
Title (EN) PRODUCTION METHOD FOR CURED PRODUCT PATTERN, PRODUCTION METHOD FOR OPTICAL COMPONENT, CIRCUIT BOARD AND QUARTZ MOLD REPLICA, AND IMPRINT PRETREATMENT COATING MATERIAL AND CURED PRODUCT THEREOF
(FR) PROCÉDÉ DE PRODUCTION DE MOTIF DE PRODUIT DURCI, PROCÉDÉ DE PRODUCTION DE COMPOSANT OPTIQUE, CARTE DE CIRCUIT IMPRIMÉ ET RÉPLIQUE DE MOULE DE QUARTZ, ET MATÉRIAU DE REVÊTEMENT DE PRÉTRAITEMENT D'IMPRESSION ET PRODUIT DURCI ASSOCIÉ
(JA) 硬化物パターンの製造方法、光学部品、回路基板および石英モールドレプリカの製造方法、ならびにインプリント前処理コート用材料およびその硬化物
Abstract:
(EN) The purpose of the present invention is to provide a production method for a cured product pattern which has a high throughput and has uniform physical properties in a shot region of a substrate. The method for producing a cured material pattern comprises: a first step (disposal step) for disposing, on a substrate (301), a layer (302) formed from a liquid film of a curable composition (α1) containing at least a component (A1) which is a polymerizable compound; and a second step (application step) for discretely applying droplets (303) of a curable composition (α2), containing at least a component (A2) which is a polymerizable compound, on a layer (302) made of a composition (α1') containing components of the curable composition (α1) from which a solvent component (D1) has been removed, wherein mixing of the composition (α1') and the curable composition (α2) is exothermic.
(FR) Le but de la présente invention est de fournir un procédé de production d'un motif de produit durci qui présente un rendement élevé et des propriétés physiques uniformes dans une région cible d'un substrat. Le procédé de production d'un motif de matériau durci comprend : une première étape (étape d'élimination) consistant à disposer, sur un substrat (301), une couche (302) formée à partir d'un film liquide d'une composition durcissable (α1) contenant au moins un composant (A1) qui est un composé polymérisable ; et une seconde étape (étape d'application) consistant à appliquer discrètement des gouttelettes (303) d'une composition durcissable (α2), contenant au moins un composant (A2) qui est un composé polymérisable, sur une couche (302) constituée d'une composition (α1') contenant des composants de la composition durcissable (α1) à partir de laquelle un composant de solvant (D1) a été éliminé, le mélange de la composition (α1') et de la composition durcissable (α2) étant exothermique.
(JA) 高スループット、かつ、基板のショット領域で均一な物性を有する硬化物パターンの製造方法を提供することを目的とする。 基板(301)上に、少なくとも重合性化合物である成分(A1)を含む硬化性組成物(α1)の液膜からなるからなる層(302)を配置する第1の工程(配置工程)と、溶剤である成分(D1)を除く前記硬化性組成物(α1)の成分の組成物(α1´)からなる層(302)上に、少なくとも重合性化合物である成分(A2)を含む硬硬化性組成物(α2)の液滴(303)を離散的に付与する第2の工程(付与工程)と、を有し、前記組成物(α1´)と前記硬化性組成物(α2)との混合が発熱的である、ことを特徴とする硬化物パターンの製造方法。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)