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1. (WO2018163466) MICROPARTICLE DETECTING ELEMENT AND MICROPARTICLE DETECTOR

Pub. No.:    WO/2018/163466    International Application No.:    PCT/JP2017/032101
Publication Date: Fri Sep 14 01:59:59 CEST 2018 International Filing Date: Thu Sep 07 01:59:59 CEST 2017
IPC: G01N 15/06
G01N 27/60
Applicants: NGK INSULATORS, LTD.
日本碍子株式会社
Inventors: KANNO, Keiichi
菅野 京一
MIZUNO, Kazuyuki
水野 和幸
OKUMURA, Hidemasa
奥村 英正
Title: MICROPARTICLE DETECTING ELEMENT AND MICROPARTICLE DETECTOR
Abstract:
This microparticle detecting element is provided with: a case having a gas flow passage through which a gas flows; an electric charge generation part in which electric charges generated by discharge are added to the microparticles in the gas introduced into the case to thereby convert the microparticles into charged microparticles; a collecting electrode that is provided inside the case and collects collection targets which are either the charged microparticles or the electric charges not added to the microparticles; and a deceleration electrode which is disposed so that at least a portion thereof is spaced apart from an outer wall of the gas flow passage in the case, and which generates a deceleration electric field that decelerates the collection targets on at least one among an upstream side of the collection electrode with respect to the gas flow, and the collection electrode.