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1. (WO2018163380) DROPLET DISCHARGE DEVICE AND CALCULATION METHOD

Pub. No.:    WO/2018/163380    International Application No.:    PCT/JP2017/009593
Publication Date: Fri Sep 14 01:59:59 CEST 2018 International Filing Date: Fri Mar 10 00:59:59 CET 2017
IPC: G03F 7/20
B41J 2/01
H05G 2/00
Applicants: GIGAPHOTON INC.
ギガフォトン株式会社
Inventors: WAKANA Katsuhiko
若菜 克彦
Title: DROPLET DISCHARGE DEVICE AND CALCULATION METHOD
Abstract:
This droplet discharge device may be provided with: a droplet discharge unit that discharges at intervals, through an opening of a nozzle connected to a tank, a droplet of a target material stored in the tank; a speed sensor that measures the speed of the droplet discharged from the droplet discharge unit; and a calculation unit that calculates, on the basis of the cross-sectional area of the opening of the nozzle and the speed of the droplet, the volume of the target material consumed per unit time.