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1. (WO2018161948) VERTICAL COMPOSITE RADIAL FLOW MOLECULAR PUMP

Pub. No.:    WO/2018/161948    International Application No.:    PCT/CN2018/078511
Publication Date: Fri Sep 14 01:59:59 CEST 2018 International Filing Date: Sat Mar 10 00:59:59 CET 2018
IPC: F04D 17/10
F04D 29/42
Applicants: CHU, Jiguo
储继国
Inventors: CHU, Jiguo
储继国
Title: VERTICAL COMPOSITE RADIAL FLOW MOLECULAR PUMP
Abstract:
Disclosed is a vertical composite radial flow molecular pump, comprising a pump cylinder (11) with the upper end being open, wherein a side wall of the pump cylinder (11) is provided with an air inlet (12) and an air outlet; a radial flow extraction unit is arranged in the pump cylinder; the radial flow extraction unit comprises a rotor (13), a stationary wheel (14) and a dynamic seal (15); two flat disc-shaped movable wheels (16) are fixedly arranged on the rotor (13); the two movable wheels (16) are parallel to each other and are spaced apart from each other; the stationary wheel (14) is arranged between the two movable wheels (16); the stationary wheel (14) is arranged in parallel with the two movable wheels (16); the dynamic seal (15) is below the wheel (16) which is located in a lower position; the stationary wheel (14) and the dynamic seal (15) are both fixedly arranged on the side wall of the pump cylinder (11); the outer side of the movable wheel (16) located in an upper position is provided with a set of turbine blade rows (17); the turbine blade rows (17) extract air from top to bottom; an extraction groove (141) composed of several spiral blades is arranged on the stationary wheel (14); and the middle part of the stationary wheel (14) is provided with no partition plates. The vertical composite radial flow molecular pump is capable of extracting air from an upper position and the side wall of the pump cylinder (11) at the same time, the middle part of the static wheel (14) is provided with no partition plates, and therefore, compared with traditional radial flow molecular pumps, the pumping speed of the radial flow molecular pump is increased by about 80%, and the compression capacity is increased by about 50%.