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1. (WO2018161569) SYSTEM AND METHOD FOR MONITORING TEMPERATURE OF SUBSTRATE HEATING FURNACE

Pub. No.:    WO/2018/161569    International Application No.:    PCT/CN2017/106367
Publication Date: Fri Sep 14 01:59:59 CEST 2018 International Filing Date: Tue Oct 17 01:59:59 CEST 2017
IPC: F27D 21/00
G01J 5/00
Applicants: BOE TECHNOLOGY GROUP CO., LTD.
京东方科技集团股份有限公司
HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD.
合肥鑫晟光电科技有限公司
Inventors: XIANG, Xin
向鑫
GUO, Zhiguang
郭知广
HOU, Benxiang
侯本象
WANG, Yunjie
王允杰
YANG, Fan
杨帆
Title: SYSTEM AND METHOD FOR MONITORING TEMPERATURE OF SUBSTRATE HEATING FURNACE
Abstract:
A system and method for monitoring temperature of a substrate heating furnace (10). The system for monitoring temperature of the substrate heating furnace (10) comprises a temperature monitor (40). The temperature monitor (40) is provided on a fork prong (31) of a mechanical arm (30) configured to pick and place substrates (20). The temperature monitor (40) is configured to monitor the temperature of each substrate (20) which is heated by the substrate heating furnace (10) and is located on the fork prong (31). According to the system for monitoring temperature of the substrate heating furnace (10), the temperature monitor (40) can directly monitor the temperature of each substrate (20), so as to directly obtain the temperature of each substrate (20) heated by the substrate heating furnace (10), the obtained temperature of the substrate (20) is more accurate, and thus temperature monitoring accuracy of the substrates (20) can be improved.