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1. (WO2018160541) SCRATCH RESISTANT FILMS AND METHODS OF MAKING THE SAME

Pub. No.:    WO/2018/160541    International Application No.:    PCT/US2018/019883
Publication Date: Sat Sep 08 01:59:59 CEST 2018 International Filing Date: Wed Feb 28 00:59:59 CET 2018
IPC: C03C 17/06
C03C 17/22
C03C 17/23
Applicants: CORNING INCORPORATED
Inventors: PAULSON, Charles Andrew
Title: SCRATCH RESISTANT FILMS AND METHODS OF MAKING THE SAME
Abstract:
An article is provided which includes a substrate and a film disposed on a surface of the substrate. The film includes an aluminum concentration of about 45 atomic % to about 50 atomic %, a nitrogen concentration of about 26 atomic % to about 46 atomic % and an oxygen concentration of from about 4 atomic % to about 24 atomic %. The substrate comprises a bow of less than about 0.0005 meters.