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1. (WO2018160502) DETERMINING THE IMPACTS OF STOCHASTIC BEHAVIOR ON OVERLAY METROLOGY DATA

Pub. No.:    WO/2018/160502    International Application No.:    PCT/US2018/019793
Publication Date: Sat Sep 08 01:59:59 CEST 2018 International Filing Date: Wed Feb 28 00:59:59 CET 2018
IPC: H01L 21/66
Applicants: KLA-TENCOR CORPORATION
Inventors: GUREVICH, Evgeni
ADEL, Michael E.
GRONHEID, Roel
FELER, Yoel
LEVINSKI, Vladimir
KLEIN, Dana
AHARON, Sharon
Title: DETERMINING THE IMPACTS OF STOCHASTIC BEHAVIOR ON OVERLAY METROLOGY DATA
Abstract:
Methods are provided for designing metrology targets and estimating the uncertainty error of metrology metric values with respect to stochastic noise such as line properties (e.g., line edge roughness, LER). Minimal required dimensions of target elements may be derived from analysis of the line properties and uncertainty error of metrology measurements, by either CDSEM (critical dimension scanning electron microscopy) or optical systems, with corresponding targets. The importance of this analysis is emphasized in view of the finding that stochastic noise may have increased importance with when using more localized models such as CPE (correctables per exposure). The uncertainty error estimation may be used for target design, enhancement of overlay estimation and evaluation of measurement reliability in multiple contexts.