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1. (WO2018160185) FLOATING SHIELD COPLANAR WAVEGUIDE TRANSMISSION LINE STRUCTURES FOR QUBITS

Pub. No.:    WO/2018/160185    International Application No.:    PCT/US2017/020562
Publication Date: Sat Sep 08 01:59:59 CEST 2018 International Filing Date: Sat Mar 04 00:59:59 CET 2017
IPC: H01P 3/00
H01P 3/12
H01P 3/16
Applicants: INTEL CORPORATION
Inventors: ROBERTS, Jeanette M.
PELLERANO, Stefano
YOSCOVITS, Zachary R.
CAUDILLO, Roman
CLARKE, James S.
ELSHERBINI, Adel A.
MICHALAK, David J.
PILLARISETTY, Ravi
GEORGE, Hubert C.
THOMAS, Nicole K.
SINGH, Kanwaljit
Title: FLOATING SHIELD COPLANAR WAVEGUIDE TRANSMISSION LINE STRUCTURES FOR QUBITS
Abstract:
Described herein are new transmission line structures for use as resonators and non-resonant transmission lines in quantum circuits. In one aspect of the disclosure, a proposed structure includes a conductive shield structure provided over or in the substrate, a dielectric layer provided over the conductive shield structure, a first and a second ground plane structures provided over the dielectric layer, and a signal line structure provided over the dielectric layer, between the first and second ground plane structures. The conductive shield structure is electrically floating and each of the first and second ground plane structures and the signal line are provided opposite a respective portion of the conductive shield structure. Transmission line structures as proposed herein could be used for providing microwave connectivity to, from, or/and between the qubits, or to control the qubits. Methods for fabricating such structures are disclosed as well.