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1. (WO2018159825) INSPECTION SYSTEM AND INSPECTION METHOD

Pub. No.:    WO/2018/159825    International Application No.:    PCT/JP2018/008071
Publication Date: Sat Sep 08 01:59:59 CEST 2018 International Filing Date: Sat Mar 03 00:59:59 CET 2018
IPC: G01N 21/88
G01B 11/30
Applicants: RICOH ELEMEX CORPORATION
リコーエレメックス株式会社
KOCHI PREFECTURAL PUBLIC UNIVERSITY CORPORATION
高知県公立大学法人
Inventors: AKAZAWA, Keiichi
赤澤 圭一
INOUE, Yasuyuki
井上 靖之
KURIHARA, Toru
栗原 徹
Title: INSPECTION SYSTEM AND INSPECTION METHOD
Abstract:
The inspection system according to an embodiment of the present invention is provided with: an illumination unit for sequentially switching and outputting a plurality of stripe patterns so that after a first stripe pattern has moved for a single period, a second stripe pattern seamlessly moves for a single period; a first signal output unit for outputting a first signal as a trigger for starting output of the plurality of stripe patterns to the illumination unit; a second signal output unit for outputting a second signal as a trigger for switching the plurality of stripe patterns to the illumination unit; an image data acquiring unit for acquiring time correlation image data by starting superposition of frames at a timing based on the first signal, the frames being outputted from an image sensor; an image generating unit for generating a first time correlation image corresponding to only the first stripe pattern and a second time correlation image corresponding to only the second stripe pattern on the basis of the time correlation image data; and a fault detection unit for detecting a fault in an inspection object surface on the basis of the first time correlation image and the second time correlation image.