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1. (WO2018159085) SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING DEVICE, AND SUBSTRATE PROCESSING METHOD

Pub. No.:    WO/2018/159085    International Application No.:    PCT/JP2017/046520
Publication Date: Sat Sep 08 01:59:59 CEST 2018 International Filing Date: Wed Dec 27 00:59:59 CET 2017
IPC: H01L 21/02
G05B 19/418
H01L 21/677
Applicants: SCREEN HOLDINGS CO., LTD.
株式会社SCREENホールディングス
Inventors: SHIBATA Hideki
柴田 英樹
KIMURA Ryuichi
木村 隆一
Title: SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING DEVICE, AND SUBSTRATE PROCESSING METHOD
Abstract:
The present invention has the purpose of preparing a schedule of an unarrived lot so that the schedule does not butt into a schedule of another lot to be prepared thereafter. In order to achieve the purpose, a scheduling unit prepares, as a temporary schedule, a schedule of an unarrived lot on the basis of a schedule of an arrived lot and a recipe of the unarrived lot, and transmits the temporary schedule to a host computer. The host computer determines whether to convey the unarrived lot to a substrate processing device on the basis of the temporary schedule, and upon determining to convey the unarrived lot to the substrate processing device, provides, to the scheduling unit, a signal indicating conveyance of the unarrived lot to the substrate processing device. Upon receiving the signal, the scheduling unit executes a reservation process for reserving, in the scheduling unit, the temporary schedule of the unarrived lot as an exclusive schedule from a schedule of another lot, before the unarrived lot arrives at the substrate processing device.