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|1. (WO2018159056) ELECTRON SOURCE AND ELECTRON BEAM DEVICE USING SAME|
|Applicants:||HITACHI HIGH-TECHNOLOGIES CORPORATION
|Title:||ELECTRON SOURCE AND ELECTRON BEAM DEVICE USING SAME|
Provided are an electron source usable stably over a long period of time even if a hexaboride compound is used, and an electron beam device using this electron source. The electron source comprises: a metallic filament (103); a metal tube (112) fixed onto the filament (103) and having a plurality of recessed portions (117) disposed in at least two axial directions in the outer periphery thereof so as to surround a central axis; and a columnar hexaboride compound tip (104) wherefrom electrons are released, disposed so as to protrude from the interior of the metal tube (112) to the side facing away from the filament (103), and in contact with the respective bottom portions of the plurality of recessed portions (117) from the metal tube (112).