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1. (WO2018159056) ELECTRON SOURCE AND ELECTRON BEAM DEVICE USING SAME

Pub. No.:    WO/2018/159056    International Application No.:    PCT/JP2017/044177
Publication Date: Sat Sep 08 01:59:59 CEST 2018 International Filing Date: Sat Dec 09 00:59:59 CET 2017
IPC: H01J 1/15
H01J 1/16
H01J 9/04
H01J 37/06
Applicants: HITACHI HIGH-TECHNOLOGIES CORPORATION
株式会社日立ハイテクノロジーズ
Inventors: KUSUNOKI Toshiaki
楠 敏明
KASUYA Keigo
糟谷 圭吾
OHSHIMA Takashi
大嶋 卓
HASHIZUME Tomihiro
橋詰 富博
ARAI Noriaki
荒井 紀明
OSE Yoichi
小瀬 洋一
Title: ELECTRON SOURCE AND ELECTRON BEAM DEVICE USING SAME
Abstract:
Provided are an electron source usable stably over a long period of time even if a hexaboride compound is used, and an electron beam device using this electron source. The electron source comprises: a metallic filament (103); a metal tube (112) fixed onto the filament (103) and having a plurality of recessed portions (117) disposed in at least two axial directions in the outer periphery thereof so as to surround a central axis; and a columnar hexaboride compound tip (104) wherefrom electrons are released, disposed so as to protrude from the interior of the metal tube (112) to the side facing away from the filament (103), and in contact with the respective bottom portions of the plurality of recessed portions (117) from the metal tube (112).