Some content of this application is unavailable at the moment.
If this situation persist, please contact us atFeedback&Contact
1. (WO2018159056) ELECTRON SOURCE AND ELECTRON BEAM DEVICE USING SAME
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.: WO/2018/159056 International Application No.: PCT/JP2017/044177
Publication Date: 07.09.2018 International Filing Date: 08.12.2017
IPC:
H01J 1/15 (2006.01) ,H01J 1/16 (2006.01) ,H01J 9/04 (2006.01) ,H01J 37/06 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
1
Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
02
Main electrodes
13
Solid thermionic cathodes
15
Cathodes heated directly by an electric current
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
1
Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
02
Main electrodes
13
Solid thermionic cathodes
15
Cathodes heated directly by an electric current
16
characterised by the shape
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
9
Apparatus or processes specially adapted for the manufacture of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
02
Manufacture of electrodes or electrode systems
04
of thermionic cathodes
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02
Details
04
Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
06
Electron sources; Electron guns
Applicants:
株式会社日立ハイテクノロジーズ HITACHI HIGH-TECHNOLOGIES CORPORATION [JP/JP]; 東京都港区西新橋一丁目24番14号 24-14, Nishi-Shimbashi 1-chome, Minato-ku, Tokyo 1058717, JP
Inventors:
楠 敏明 KUSUNOKI Toshiaki; JP
糟谷 圭吾 KASUYA Keigo; JP
大嶋 卓 OHSHIMA Takashi; JP
橋詰 富博 HASHIZUME Tomihiro; JP
荒井 紀明 ARAI Noriaki; JP
小瀬 洋一 OSE Yoichi; JP
Agent:
ポレール特許業務法人 POLAIRE I.P.C.; 東京都中央区日本橋茅場町二丁目13番11号 13-11, Nihonbashikayabacho 2-chome, Chuo-ku, Tokyo 1030025, JP
Priority Data:
2017-03588228.02.2017JP
Title (EN) ELECTRON SOURCE AND ELECTRON BEAM DEVICE USING SAME
(FR) SOURCE D’ÉLECTRONS ET DISPOSITIF À FAISCEAU D’ÉLECTRONS UTILISANT CELLE-CI
(JA) 電子源およびそれを用いた電子線装置
Abstract:
(EN) Provided are an electron source usable stably over a long period of time even if a hexaboride compound is used, and an electron beam device using this electron source. The electron source comprises: a metallic filament (103); a metal tube (112) fixed onto the filament (103) and having a plurality of recessed portions (117) disposed in at least two axial directions in the outer periphery thereof so as to surround a central axis; and a columnar hexaboride compound tip (104) wherefrom electrons are released, disposed so as to protrude from the interior of the metal tube (112) to the side facing away from the filament (103), and in contact with the respective bottom portions of the plurality of recessed portions (117) from the metal tube (112).
(FR) L'invention concerne une source d'électrons pouvant être utilisée de manière stable sur une longue période de temps même si un composé d'hexaborure est utilisé, et un dispositif à faisceau d'électrons utilisant cette source d'électrons. La source d'électrons comprend : un filament métallique (103); un tube métallique (112) fixé sur le filament (103) et ayant une pluralité de parties évidées (117) disposées dans au moins deux directions axiales dans sa périphérie externe de manière à entourer un axe central; et une pointe de composé d'hexaborure en colonne (104) d'où des électrons sont libérés, disposée de manière à faire saillie à partir de l'intérieur du tube métallique (112) vers le côté opposé au filament (103), et en contact avec les parties inférieures respectives de la pluralité de parties évidées (117) à partir du tube métallique (112).
(JA) 六ホウ化物を用いた場合であっても、長時間安定に使用できる電子源およびそれを用いた電子線装置を提供する。金属製のフィラメント(103)と、フィラメント(103)に固定され、外周において中心軸を囲むように少なくとも2軸方向に配置された複数の凹部(117)を有する金属管(112)と、電子を放出し、金属管(112)の内部からフィラメント(103)の反対側に突き出て配置され、金属管(112)の複数の凹部(117)のそれぞれの底部と接触している柱状の六ホウ化物のチップ(104)と、を備えた電子源とする。
front page image
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)