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1. (WO2018158631) ELECTROMAGNETIC RADIATION DETECTOR BASED ON WAFER BONDING

Pub. No.:    WO/2018/158631    International Application No.:    PCT/IB2018/000166
Publication Date: Sat Sep 08 01:59:59 CEST 2018 International Filing Date: Fri Mar 02 00:59:59 CET 2018
IPC: H01L 27/146
Applicants: G-RAY SWITZERLAND SA
Inventors: VON KÄNEL, Hans
Title: ELECTROMAGNETIC RADIATION DETECTOR BASED ON WAFER BONDING
Abstract:
Monolithic pixel detectors, systems and methods for the detection and imaging of electromagnetic radiation with high spectral and spatial resolution comprise a Si wafer with a CMOS processed pixel readout bonded to an absorber wafer in wafer bonds comprising conducting bonds between doped, highly conducting charge collectors in the readout and highly conducting regions in the absorber wafer and poorly conducting bonds between regions of high resistivity.