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1. (WO2018155034) OXIDE SEMICONDUCTOR AND SEMICONDUCTOR DEVICE
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Pub. No.: WO/2018/155034 International Application No.: PCT/JP2018/001729
Publication Date: 30.08.2018 International Filing Date: 22.01.2018
IPC:
C01G 33/00 (2006.01) ,H01L 29/786 (2006.01)
C CHEMISTRY; METALLURGY
01
INORGANIC CHEMISTRY
G
COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F94
33
Compounds of niobium
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
29
Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having at least one potential-jump barrier or surface barrier; Capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof
66
Types of semiconductor device
68
controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified, or switched
76
Unipolar devices
772
Field-effect transistors
78
with field effect produced by an insulated gate
786
Thin-film transistors
Applicants:
国立研究開発法人産業技術総合研究所 NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY [JP/JP]; 東京都千代田区霞が関1丁目3番1号 3-1,Kasumigaseki 1-chome, Chiyoda-ku, Tokyo 1008921, JP
Inventors:
菊地 直人 KIKUCHI, Naoto; JP
相浦 義弘 AIURA, Yoshihiro; JP
三溝 朱音 SAMIZO, Akane; JP
池田 紳太郎 IKEDA, Shintarou; JP
Agent:
特許業務法人筒井国際特許事務所 TSUTSUI & ASSOCIATES; 東京都新宿区新宿2丁目3番10号 新宿御苑ビル3階 3F, Shinjuku Gyoen Bldg., 3-10, Shinjuku 2-chome, Shinjuku-ku, Tokyo 1600022, JP
Priority Data:
2017-03211323.02.2017JP
Title (EN) OXIDE SEMICONDUCTOR AND SEMICONDUCTOR DEVICE
(FR) DISPOSITIF SEMI-CONDUCTEUR D'OXYDE ET SEMI-CONDUCTEUR
(JA) 酸化物半導体及び半導体装置
Abstract:
(EN) Provided are: an oxide semiconductor device capable of providing a p-type semiconductor in an oxide semiconductor and having excellent transparency, mobility, and weather resistance; and a semiconductor device comprising said oxide semiconductor. This oxide semiconductor has a crystal structure including a fordite structure, comprises a composite oxide including elements Nb and Sn , and has positive holes that serve as charge carriers as a result of Sn4+/(Sn2+ + Sn4+), which is the Sn4+ ratio relative to the total Sn content in the composite oxide, being 0.006 ≤ Sn4+/(Sn2+ + Sn4+) ≤ 0.013.
(FR) L'invention concerne : un dispositif semi-conducteur d'oxyde capable de fournir un semi-conducteur de type p dans un semi-conducteur d'oxyde et ayant une excellente transparence, une excellente mobilité et une excellente résistance aux intempéries; et un dispositif semi-conducteur comprenant ledit semi-conducteur d'oxyde. Ce semi-conducteur d'oxyde a une structure cristalline comprenant une structure fordite, comprend un oxyde composite comprenant des éléments Nb et Sn, et présente des trous positifs qui servent de porteurs de charge en raison de Sn4+/(Sn2+ + Sn4+), qui est le rapport de Sn4+ par rapport à la teneur totale en Sn dans l'oxyde composite, étant 0,006 ≤ Sn4+/(Sn2+ + Sn4+) ≤ 0,013.
(JA) 酸化物半導体においてp型半導体を実現可能にし、透明性、移動度、耐候性等の優れた酸化物半導体及び該酸化物半導体を備える半導体装置を提供する。フォーダイト構造を含む結晶構造を有し、Nb元素とSn元素を含む複合酸化物で構成され、前記複合酸化物中の全Sn量に対するSn4+の割合であるSn4+/(Sn2++Sn4+)が0.006≦Sn4+/(Sn2++Sn4+)≦0.013であることにより、正孔が荷電担体となる酸化物半導体を実現する。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)