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1. WO2018150979 - GAS PROCESSING DEVICE AND SUBSTRATE PROCESSING DEVICE

Publication Number WO/2018/150979
Publication Date 23.08.2018
International Application No. PCT/JP2018/004267
International Filing Date 07.02.2018
Chapter 2 Demand Filed 01.10.2018
IPC
B01D 53/18 2006.1
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
DSEPARATION
53Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases or aerosols
14by absorption
18Absorbing units; Liquid distributors therefor
B01D 53/46 2006.1
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
DSEPARATION
53Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases or aerosols
34Chemical or biological purification of waste gases
46Removing components of defined structure
B01D 53/58 2006.1
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
DSEPARATION
53Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases or aerosols
34Chemical or biological purification of waste gases
46Removing components of defined structure
54Nitrogen compounds
58Ammonia
B01D 53/68 2006.1
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
DSEPARATION
53Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases or aerosols
34Chemical or biological purification of waste gases
46Removing components of defined structure
68Halogens or halogen compounds
B01D 53/72 2006.1
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
DSEPARATION
53Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases or aerosols
34Chemical or biological purification of waste gases
46Removing components of defined structure
72Organic compounds not provided for in groups B01D53/48-B01D53/7097
B01D 53/78 2006.1
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
DSEPARATION
53Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases or aerosols
34Chemical or biological purification of waste gases
74General processes for purification of waste gases; Apparatus or devices specially adapted therefor
77Liquid phase processes
78with gas-liquid contact
CPC
B01D 53/18
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
DSEPARATION
53Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols,
14by absorption
18Absorbing units; Liquid distributors therefor
B01D 53/46
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
DSEPARATION
53Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols,
34Chemical or biological purification of waste gases
46Removing components of defined structure
B01D 53/58
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
DSEPARATION
53Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols,
34Chemical or biological purification of waste gases
46Removing components of defined structure
54Nitrogen compounds
58Ammonia
B01D 53/68
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
DSEPARATION
53Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols,
34Chemical or biological purification of waste gases
46Removing components of defined structure
68Halogens or halogen compounds
B01D 53/72
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
DSEPARATION
53Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols,
34Chemical or biological purification of waste gases
46Removing components of defined structure
72Organic compounds not provided for in groups B01D53/48 - B01D53/70, e.g. hydrocarbons
B01D 53/78
BPERFORMING OPERATIONS; TRANSPORTING
01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
DSEPARATION
53Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols,
34Chemical or biological purification of waste gases
74General processes for purification of waste gases; Apparatus or devices specially adapted therefor
77Liquid phase processes
78with gas-liquid contact
Applicants
  • 東京エレクトロン株式会社 TOKYO ELECTRON LIMITED [JP]/[JP]
Inventors
  • 戸島 孝之 TOSHIMA, Takayuki
  • 寺田 和雄 TERADA, Kazuo
  • 小野 優子 ONO, Yuko
  • 坂本 和生 SAKAMOTO, Kazuo
Agents
  • 特許業務法人酒井国際特許事務所 SAKAI INTERNATIONAL PATENT OFFICE
Priority Data
2017-02633315.02.2017JP
2017-16159024.08.2017JP
Publication Language Japanese (ja)
Filing Language Japanese (JA)
Designated States
Title
(EN) GAS PROCESSING DEVICE AND SUBSTRATE PROCESSING DEVICE
(FR) DISPOSITIF DE TRAITEMENT DE GAZ ET PROCÉDÉ DE TRAITEMENT DE SUBSTRAT
(JA) 気体処理装置および基板処理装置
Abstract
(EN) A gas processing device according to this embodiment comprises a housing, a lyophilic nonwoven fabric, a liquid supply unit, a gas introduction unit, and a gas discharge unit. The housing has an internal space. The lyophilic nonwoven fabric is disposed in the internal space. The liquid supply unit supplies cleaning liquid to the nonwoven fabric. The gas introduction unit introduces gas to the internal space. The gas discharge unit discharges gas from the internal space. In addition, the gas processing device according to this embodiment brings gas introduced from the gas introduction unit into contact with a liquid film of the cleaning liquid formed on the surface of the nonwoven fabric.
(FR) Un dispositif de traitement de gaz selon ce mode de réalisation comprend un boîtier, un tissu non-tissé lyophile, une unité d'alimentation en liquide, une unité d'introduction de gaz et une unité de décharge de gaz. Le boitier présente un espace interne. Le tissu non tissé lyophile est disposé dans l'espace interne. L'unité d'alimentation en liquide fournit un liquide de nettoyage au tissu non tissé . L'unité d'introduction de gaz introduit du gaz dans l'espace interne. L'unité de décharge de gaz évacue le gaz de l'espace interne. De plus, le dispositif de traitement de gaz selon ce mode de réalisation amène le gaz introduit à partir de l'unité d'introduction de gaz en contact avec un film liquide du liquide de nettoyage formé sur la surface du tissu non tissé.
(JA) 実施形態に係る気体処理装置は、筐体と、親液性の不織布と、液供給部と、気体導入部と、気体排出部とを備える。筐体は、内部空間を有する。親液性の不織布は、内部空間に配置される。液供給部は、不織布に洗浄液を供給する。気体導入部は、内部空間に気体を導入する。気体排出部は、気体を内部空間から排出する。そして、実施形態に係る気体処理装置は、不織布の表面に形成された洗浄液の液膜に気体導入部から導入された気体を接触させる。
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