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1. WO2018149097 - CRUCIBLE, EVAPORATION PREPARATION DEVICE, EVAPORATION EQUIPMENT AND EVAPORATION METHOD

Publication Number WO/2018/149097
Publication Date 23.08.2018
International Application No. PCT/CN2017/095415
International Filing Date 01.08.2017
IPC
C23C 14/24 2006.01
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
24Vacuum evaporation
CPC
C23C 14/243
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
24Vacuum evaporation
243Crucibles for source material
C23C 14/26
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
24Vacuum evaporation
26by resistance or inductive heating of the source
Applicants
  • BOE TECHNOLOGY GROUP CO., LTD. [CN]/[CN]
Inventors
  • SHEN, Yongqi
Agents
  • TEE&HOWE INTELLECTUAL PROPERTY ATTORNEYS
Priority Data
201710086738.817.02.2017CN
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) CRUCIBLE, EVAPORATION PREPARATION DEVICE, EVAPORATION EQUIPMENT AND EVAPORATION METHOD
(FR) CREUSET, DISPOSITIF DE PRÉPARATION D'ÉVAPORATION, ÉQUIPEMENT D'ÉVAPORATION ET PROCÉDÉ D'ÉVAPORATION
Abstract
(EN)
The present disclosure provides a crucible. The crucible includes a crucible body having an opening formed at the top thereof. The crucible further includes a sealing cover and an elastic element. The sealing cover is configured to seal the crucible in a first position and open the crucible in a second position. In the first position, the sealing cover forms a detachable sealed connection with the crucible body. The elastic element is arranged between the sealing cover and the crucible body, where the elastic element is in a compressed state when the crucible is sealed by the sealing cover in the first position. Correspondingly, the present disclosure also provides an evaporation preparation device, evaporation equipment and an evaporation method. The present disclosure can reduce the deterioration of the material to be evaporated and the direct contact between human body and the material.
(FR)
La présente invention concerne un creuset. Le creuset comprend un corps de creuset possédant une ouverture formée au sommet de celui-ci. Le creuset comprend en outre un couvercle hermétique et un élément élastique. Le couvercle hermétique est conçu pour fermer hermétiquement le creuset dans une première position et ouvrir le creuset dans une seconde position. Dans la première position, le couvercle hermétique forme un raccordement étanche amovible avec le corps de creuset. L'élément élastique est disposé entre le couvercle hermétique et le corps de creuset, l'élément élastique étant dans un état comprimé lorsque le creuset est fermé hermétiquement par le couvercle hermétique dans la première position. En conséquence, la présente invention concerne également un dispositif de préparation d'évaporation, un équipement d'évaporation et un procédé d'évaporation. La présente invention peut réduire la détérioration du matériau à évaporer et le contact direct entre le corps humain et le matériau.
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