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1. (WO2018147122) COATING DEVICE AND METHOD FOR MANUFACTURING COATED ARTICLE
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Pub. No.: WO/2018/147122 International Application No.: PCT/JP2018/002837
Publication Date: 16.08.2018 International Filing Date: 30.01.2018
IPC:
C23C 14/54 (2006.01) ,C23C 14/06 (2006.01) ,C23C 14/24 (2006.01) ,C23C 14/34 (2006.01) ,C23C 14/50 (2006.01) ,F16J 9/26 (2006.01)
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
54
Controlling or regulating the coating process
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
06
characterised by the coating material
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
24
Vacuum evaporation
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
34
Sputtering
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
50
Substrate holders
F MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
16
ENGINEERING ELEMENTS OR UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
J
PISTONS; CYLINDERS; PRESSURE VESSELS IN GENERAL; SEALINGS
9
Piston-rings, seats therefor; Ring sealings of similar construction in general
26
characterised by the use of particular materials
Applicants:
株式会社神戸製鋼所 KABUSHIKI KAISHA KOBE SEIKO SHO (KOBE STEEL, LTD.) [JP/JP]; 兵庫県神戸市中央区脇浜海岸通二丁目2番4号 2-4, Wakinohama-Kaigandori 2-chome, Chuo-ku, Kobe-shi, Hyogo 6518585, JP
Inventors:
藤井 博文 FUJII, Hirofumi; --
Agent:
小谷 悦司 KOTANI, Etsuji; JP
小谷 昌崇 KOTANI, Masataka; JP
村松 敏郎 MURAMATSU, Toshiro; JP
Priority Data:
2017-02196809.02.2017JP
Title (EN) COATING DEVICE AND METHOD FOR MANUFACTURING COATED ARTICLE
(FR) DISPOSITIF DE REVÊTEMENT ET PROCÉDÉ DE FABRICATION D'UN ARTICLE REVÊTU
(JA) 成膜装置および成膜物の製造方法
Abstract:
(EN) Provided is a coating device that can control film thickness distribution in the circumferential direction of a workpiece. The coating device is provided with: a workpiece rotating device (5) for rotating and revolving a plurality of workpieces (100) held thereby; targets (3) having ejection surfaces (3a) from which particles serving as material for coating the outer peripheral surfaces of the workpieces (100) are ejected; power supplies (4) for imparting to the targets (3) an arc current by which the particles are ejected from the targets (3); and a control unit (23) for controlling each power supply (4) such that the output for the arc current is higher than a reference output in a specific period which is at least part of a period wherein a specific part (102) of a rotating workpiece (100) is oriented to an ejection surface (3a).
(FR) La présente invention concerne un dispositif de revêtement qui peut contrôler la distribution d'épaisseur de pellicule dans la direction circonférentielle d'une pièce à travailler. Le dispositif de revêtement comprend : un dispositif de rotation de pièce à travailler (5) pour faire tourner autour d’un axe et sur elles-mêmes une pluralité de pièces à travailler (100) maintenues par celui-ci ; des cibles (3) ayant des surfaces d'éjection (3a) à partir desquelles des particules servant de matériau pour revêtir les surfaces périphériques externes des pièces à travailler (100) sont éjectées ; des alimentations électriques (4) pour communiquer aux cibles (3) un courant d'arc par lequel les particules sont éjectées des cibles (3) ; et une unité de commande (23) pour commander chaque alimentation électrique (4) de sorte que la sortie du courant d'arc soit supérieure à une sortie de référence dans une période spécifique qui est au moins une partie d'une période dans laquelle une partie spécifique (102) d'une pièce à travailler rotative (100) est orientée vers une surface d'éjection (3a).
(JA) ワークの周方向の膜厚分布を制御することが可能な成膜装置が提供される。成膜装置は、複数のワーク(100)を保持して自公転させるワーク回転装置(5)と、ワーク(100)の外周面を成膜するための材料となる粒子が飛び出す出射面(3a)を有するターゲット(3)と、ターゲット(3)から粒子が飛び出すためのアーク電流をターゲット(3)に与える電源(4)と、自転するワーク(100)の特定部分(102)が出射面(3a)を向く期間の少なくとも一部である特定期間においてアーク電流を基準出力よりも高い出力にするように電源(4)を制御する制御部(23)と、を備える。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)