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1. (WO2018146941) VAPOR DEPOSITION MASK-SECURING DEVICE
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.: WO/2018/146941 International Application No.: PCT/JP2017/044900
Publication Date: 16.08.2018 International Filing Date: 14.12.2017
IPC:
C23C 14/04 (2006.01) ,H01L 51/50 (2006.01) ,H05B 33/10 (2006.01)
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
04
Coating on selected surface areas, e.g. using masks
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
51
Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
50
specially adapted for light emission, e.g. organic light emitting diodes (OLED) or polymer light emitting devices (PLED)
H ELECTRICITY
05
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
B
ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR
33
Electroluminescent light sources
10
Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
Applicants: JAPAN DISPLAY INC.[JP/JP]; 3-7-1, Nishi-shinbashi, Minato-ku, Tokyo 1050003, JP
Inventors: NARIYA, Mototsugu; JP
TAKEDA, Atsushi; JP
Agent: HARUKA PATENT & TRADEMARK ATTORNEYS; Rokubancho SK Bldg. 5th Floor, 3, Rokubancho, Chiyoda-ku, Tokyo 1020085, JP
Priority Data:
2017-02287310.02.2017JP
Title (EN) VAPOR DEPOSITION MASK-SECURING DEVICE
(FR) DISPOSITIF DE FIXATION DE MASQUE DE DÉPÔT EN PHASE VAPEUR
(JA) 蒸着マスク固定装置
Abstract:
(EN) A mask-securing device for securing a plurality of masks to a frame, wherein device production costs are reduced and variation in the alignment accuracy of the plurality of masks is also reduced. This vapor deposition mask-securing device for securing a plurality of vapor deposition masks to a frame provided with a plurality of openings which correspond to the plurality of vapor deposition masks includes at least one alignment stage which has a placement section on which the vapor deposition masks are placed, and an alignment mechanism for aligning the vapor deposition masks by moving said masks along a frame surface facing the vapor deposition masks. Therein, the alignment stage moves in sequential order to the locations of the plurality of openings provided in the frame, and the alignment stage aligns the corresponding vapor deposition masks at the opening locations.
(FR) Cette invention concerne un dispositif de fixation de masque pour fixer une pluralité de masques à un cadre, permettant de réduire les coûts de production du dispositif ainsi que la variation de la précision d'alignement de la pluralité de masques. Ledit dispositif de fixation de masque de dépôt en phase vapeur pour fixer une pluralité de masques de dépôt en phase vapeur à un cadre pourvu d'une pluralité d'ouvertures qui correspondent à la pluralité de masques de dépôt en phase vapeur, comprend au moins un étage d'alignement qui possède une section de placement sur laquelle sont placés les masques de dépôt en phase vapeur, et un mécanisme d'alignement pour aligner les masques de dépôt en phase vapeur en déplaçant lesdits masques le long d'une surface de cadre faisant face aux masques de dépôt en phase vapeur. L'étage d'alignement se déplace en ordre séquentiel vers les emplacements de la pluralité d'ouvertures ménagées dans le cadre, et l'étage d'alignement aligne les masques de dépôt en phase vapeur correspondants sur les emplacements d'ouverture.
(JA) 複数のマスクをフレームに固定するマスク固定装置において、装置の製造コストを削減するとともに、複数のマスクにおけるアライメント精度のばらつきを減少させる。 複数の蒸着マスクを、複数の蒸着マスクそれぞれに対応する複数の開口が設けられたフレームに固定する蒸着マスク固定装置は、蒸着マスクを載置する載置部と、蒸着マスクをフレームの蒸着マスクと対向する面に沿って移動させてアライメントするアライメント機構と、を有する少なくとも1つのアライメントステージ、を含み、アライメントステージが前記フレームに設けられた複数の開口の位置に順に移動し、アライメントステージは、各開口の位置において対応する蒸着マスクをアライメントする。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)