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1. WO2018146817 - VACUUM DEVICE

Publication Number WO/2018/146817
Publication Date 16.08.2018
International Application No. PCT/JP2017/005172
International Filing Date 13.02.2017
IPC
C23C 16/505 2006.1
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
16Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (CVD) processes
44characterised by the method of coating
50using electric discharges
505using radio frequency discharges
CPC
C23C 16/505
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
16Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
44characterised by the method of coating
50using electric discharges
505using radio frequency discharges
Applicants
  • 堺ディスプレイプロダクト株式会社 SAKAI DISPLAY PRODUCTS CORPORATION [JP]/[JP]
Inventors
  • 庄司 敦史 SHOJI, Atsushi
Agents
  • 鮫島 睦 SAMEJIMA, Mutsumi
  • 前堀 義之 MAEHORI, Yoshiyuki
  • 山崎 敏行 YAMASAKI, Toshiyuki
Priority Data
Publication Language Japanese (ja)
Filing Language Japanese (JA)
Designated States
Title
(EN) VACUUM DEVICE
(FR) DISPOSITIF À VIDE
(JA) 真空装置
Abstract
(EN) In the present invention, a chamber body has an opening (11a). A lid body opens and closes the opening (11a). An annular groove 14, in which a seal member (13) is disposed, is provided in one of a lid-body-side end face of the opening (11a) and a chamber-body-side end face of the lid body. A wall surface (14a) on the inner side in the radial direction of the annular groove (14) is formed such that a cross-section thereof has an elliptic arc shape, a circular arc shape, or a linear shape inclined with respect to a bottom surface of the annular groove (14), and is in contact with the seal member (13). A wall surface (14b) on the outer side in the radial direction of the annular groove (14) is formed so as to have a gap between the seal member (13) and an end section located on the other side of the lid-body-side end face of the opening (11a) and the chamber-body-side end face of the lid body, and is not in contact with the seal member (13).
(FR) Dans la présente invention, un corps de chambre comporte une ouverture (11a). Un corps de couvercle ouvre et ferme l'ouverture (11a). Une rainure annulaire (14), dans laquelle est disposé un élément d'étanchéité (13), est disposée une face d'extrémité côté corps de couvercle de l'ouverture (11a) ou une face d'extrémité côté corps de chambre du corps de couvercle. Une surface de paroi (14a) sur le côté interne dans la direction radiale de la rainure annulaire (14) est formée de telle sorte qu'une section transversale de cette dernière présente une forme d'arc elliptique, une forme d'arc circulaire, ou une forme linéaire inclinée par rapport à une surface inférieure de la rainure annulaire (14), et elle est en contact avec l'élément d'étanchéité (13). Une surface de paroi (14b) sur le côté externe dans la direction radiale de la rainure annulaire (14) est formée de manière à comporter un espace entre l'élément d'étanchéité (13) et une partie d'extrémité située sur l'autre côté de la face d'extrémité côté corps de couvercle de l'ouverture (11a) et la face d'extrémité côté corps de chambre du corps de couvercle, et elle n'est pas en contact avec l'élément d'étanchéité (13).
(JA) チャンバ本体は開口部(11a)を有する。蓋体は開口部(11a)を開閉する。開口部(11a)の蓋体側の端面と蓋体のチャンバ本体側の端面との内の一方には、シール部材(13)が配置される環状溝14が設けられている。環状溝(14)の径方向内側の壁面(14a)は、断面が、楕円弧形状、円弧形状、または、環状溝(14)の底面に対して傾斜する直線形状になるように形成されて、シール部材(13)に接触する。環状溝(14)の径方向外側の壁面(14b)は、開口部(11a)の蓋体側の端面と蓋体のチャンバ本体側の端面との内の他方側に位置する端部が、シール部材(13)との間に隙間を有するように形成されて、シール部材(13)に接触しない。
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