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1. (WO2018146381) METHOD AND APPARATUS FOR COATING

Pub. No.:    WO/2018/146381    International Application No.:    PCT/FI2018/050085
Publication Date: Fri Aug 17 01:59:59 CEST 2018 International Filing Date: Wed Feb 07 00:59:59 CET 2018
IPC: B05D 3/04
B05C 9/14
F26B 5/04
Applicants: BENEQ OY
Inventors: ASIKKALA, Kai
TAMMELA, Simo
MÄÄTTÄ, Tuomo
TIMONEN, Paavo
Title: METHOD AND APPARATUS FOR COATING
Abstract:
The invention relates to a method and apparatus for forming a coating (4) on a surface of a substrate (2). The method comprising steps: a deposition step for forming a liquid film on the surface of the substrate (2) and a drying step comprising drying the liquid film for forming the coating (4) on the surface of the substrate (2). The drying step comprises drying the liquid film by forming two or more separate suction zones in which vaporized precursor or precursors are discharged from the surface of the substrate (2) by vacuum for drying the liquid film, the two or more separate suction zones being formed successively and spaced apart for drying the liquid film in a staged manner.