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1. (WO2018146146) DETECTOR FOR AN OPTICAL DETECTION OF AT LEAST ONE OBJECT

Pub. No.:    WO/2018/146146    International Application No.:    PCT/EP2018/053070
Publication Date: Fri Aug 17 01:59:59 CEST 2018 International Filing Date: Thu Feb 08 00:59:59 CET 2018
IPC: G01S 17/42
G01S 5/16
G01S 7/481
H01L 51/42
H01L 31/0256
Applicants: TRINAMIX GMBH
Inventors: LUNGENSCHMIED, Christoph
BONSIGNORE, Christian
HANDRECK, Anke
BRUDER, Ingmar
SEND, Robert
Title: DETECTOR FOR AN OPTICAL DETECTION OF AT LEAST ONE OBJECT
Abstract:
A detector (110) for an optical detection of at least one object (112) is proposed. The detector (110) comprises: - at least one optical sensor, wherein the optical sensor has at least one sensor region (130), wherein the optical sensor is designed to generate at least one sensor signal in a manner dependent on an illumination of the sensor region (130) by an incident modulated light beam (132), wherein the sensor signal is dependent on a modulation frequency of the light beam (132), wherein the sensor region (130) comprises at least one capacitive device (134), the capacitive device (134) comprising at least two electrodes (166, 174), wherein at least one insulating layer (178) and at least one photosensitive layer (180) are embedded between the electrodes (166, 174), wherein at least one of the electrodes (166, 74) is at least partially optically transparent for the light beam (132); and - at least one evaluation device (150), wherein the evaluation device (150) is designed to generate at least one item of information on a position of the object (112) by evaluating the sensor signal. In particular, the optical sensor may be a longitudinal optical sensor (114) designed to generate at least one longitudinal sensor signal, wherein the longitudinal sensor signal, given the same total power of the illumination, is further dependent on a beam cross-section of the light beam (132) in the sensor region (130), wherein the evaluation device (150) is designed to generate at least one item of information on a longitudinal position of the object (112) by evaluating the longitudinal sensor signal. Alternatively or in addition, the optical sensor may be a transversal optical sensor (160), wherein one of the electrodes (166, 174) is an electrode layer (222) having a low electrical conductivity adapted to determine a position at which the incident light beam (132) impinged the sensor region (130), wherein the transversal optical sensor (160) is designed to generate at least one transversal sensor signal dependent on the position at which the incident light beam (132) impinged the sensor region (130), wherein the evaluation device (150) is designed to generate at least one item of information on a transversal position of the object (112) by evaluating the transversal sensor signal. Thereby, a simple and, still, efficient detector for an accurate determining of a position of at least one object in space is provided which exhibits a strong non-linear behavior of an extracted ac photocurrent with a variation of a size of an impinging light spot and which, on the other hand, allows a facile preparation.