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1. WO2018143434 - DEVICE AND METHOD FOR CLEANING MONOCRYSTAL PULLING APPARATUS

Publication Number WO/2018/143434
Publication Date 09.08.2018
International Application No. PCT/JP2018/003666
International Filing Date 02.02.2018
IPC
C30B 29/06 2006.01
CCHEMISTRY; METALLURGY
30CRYSTAL GROWTH
BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
29Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
02Elements
06Silicon
CPC
B08B 1/006
BPERFORMING OPERATIONS; TRANSPORTING
08CLEANING
BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
1Cleaning by methods involving the use of tools, brushes, or analogous members
001characterised by the type of cleaning tool
006Wipes
B08B 1/008
BPERFORMING OPERATIONS; TRANSPORTING
08CLEANING
BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
1Cleaning by methods involving the use of tools, brushes, or analogous members
008using translating operative members
B08B 5/00
BPERFORMING OPERATIONS; TRANSPORTING
08CLEANING
BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
5Cleaning by methods involving the use of air flow or gas flow
B08B 9/0321
BPERFORMING OPERATIONS; TRANSPORTING
08CLEANING
BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
9Cleaning hollow articles by methods or apparatus specially adapted thereto
02Cleaning pipes or tubes or systems of pipes or tubes
027Cleaning the internal surfaces; Removal of blockages
032by the mechanical action of a moving fluid, e.g. by flushing
0321using pressurised, pulsating or purging fluid
B08B 9/0436
BPERFORMING OPERATIONS; TRANSPORTING
08CLEANING
BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
9Cleaning hollow articles by methods or apparatus specially adapted thereto
02Cleaning pipes or tubes or systems of pipes or tubes
027Cleaning the internal surfaces; Removal of blockages
04using cleaning devices introduced into and moved along the pipes
043moved by externally powered mechanical linkage, e.g. pushed or drawn through the pipes
0436provided with mechanical cleaning tools, e.g. scrapers, with or without additional fluid jets
B08B 9/087
BPERFORMING OPERATIONS; TRANSPORTING
08CLEANING
BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
9Cleaning hollow articles by methods or apparatus specially adapted thereto
08Cleaning containers, e.g. tanks
087by methods involving the use of tools, e.g. brushes, scrapers
Applicants
  • 株式会社SUMCO SUMCO CORPORATION [JP]/[JP]
Inventors
  • 沖田 憲治 OKITA Kenji
Agents
  • 志賀 正武 SHIGA Masatake
  • 寺本 光生 TERAMOTO Mitsuo
  • 五十嵐 光永 IGARASHI Koei
Priority Data
PCT/JP2017/00379602.02.2017JP
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) DEVICE AND METHOD FOR CLEANING MONOCRYSTAL PULLING APPARATUS
(FR) DISPOSITIF ET PROCÉDÉ DE NETTOYAGE D'UN APPAREIL DE TIRAGE DE MONOCRISTAUX
(JA) 単結晶引上装置のクリーニング装置、クリーニング方法
Abstract
(EN)
A cleaning device 10 for cleaning the inside of a monocrystal pulling apparatus 1 comprises a main tube part 11 which can be inserted into a pull chamber 1a, and an inner surface cleaning mechanism 17 which is provided at the upper portion of the main tube part and is for cleaning the inner surface of the pull chamber, wherein the main tube part has a retreat/housing part 12 for housing therein a retreating seed chuck provided at the lower portion of a wire, and a continuous extension mechanism 13 which is provided at the lower portion of the main tube part and which enables a plurality of extension rods 13A-13D to be added and to extend in the axial direction, whereby the inside of the pull chamber is efficiently cleaned.
(FR)
Cette invention concerne un dispositif de nettoyage 10 conçu pour nettoyer l'intérieur d'un appareil de tirage de monocristaux 11 comprenant une partie tube principal 11 qui peut être insérée dans une chambre de tirage 1a, et un mécanisme de nettoyage de surface intérieure 17 situé dans la partie supérieure de la partie tube principal et est conçu pour nettoyer la surface intérieure de la chambre de tirage, où la partie tube principal comporte une partie retrait/logement 12 conçue pour loger un mandrin de retrait de germes monté à l'extrémité inférieure d'un fil, et un mécanisme d'extension continue 13 situé dans la partie inférieure de la partie tube principal et qui permet d'ajouter une pluralité de tiges d'extension 13A-13D s'étendant dans le sens axial de façon que l'intérieur de la chambre de tirage soit efficacement nettoyé.
(JA)
単結晶引上装置1内をクリーニングするクリーニング装置10であって、プルチャンバ1a内に挿入可能な主筒部11と、主筒部の上部に、プルチャンバの内面をクリーニングする内面クリーニング機構17を備え、主筒部が、その内部にワイヤー下部のシードチャックを退避収納する退避収納部12と、主筒部の下部に複数の延伸ロッド13A~13Dを軸方向に継ぎ足し可能とする継続延伸機構13と、を備えることで、効率よくプルチャンバ内面クリーニングをおこなう。
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