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1. (WO2018143288) HOLDING DEVICE

Pub. No.:    WO/2018/143288    International Application No.:    PCT/JP2018/003251
Publication Date: Fri Aug 10 01:59:59 CEST 2018 International Filing Date: Thu Feb 01 00:59:59 CET 2018
IPC: H05B 3/02
H01L 21/02
H01L 21/3065
H05B 3/10
H05B 3/74
Applicants: NGK SPARK PLUG CO., LTD.
日本特殊陶業株式会社
Inventors: MIWA, Kaname
三輪 要
Title: HOLDING DEVICE
Abstract:
A holding device according to an aspect of the present disclosure is provided with a holding substrate having a main surface on one side in the thickness direction, and has, inside the holding substrate, a heating unit that generates heat when supplied with electricity. The heating unit is provided with: a plurality of first heating elements disposed in a plane direction perpendicular to the thickness direction of the holding substrate; and a second heating element disposed closer to the main surface on one side in the thickness direction than the plurality of first heating elements. One of the plurality of first heating elements and the second heating element are electrically connected in series by a first via extending in the thickness direction in the holding substrate.