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|1. (WO2018143130) SUBSTRATE-GRIPPING HAND AND SUBSTRATE-CONVEYING DEVICE|
|Applicants:||KAWASAKI JUKOGYO KABUSHIKI KAISHA
|Title:||SUBSTRATE-GRIPPING HAND AND SUBSTRATE-CONVEYING DEVICE|
A substrate-gripping hand mounted on a hand end part of a manipulator, the substrate-gripping hand gripping a round disk-shaped substrate that is in a perpendicular or inclined attitude, wherein the substrate-gripping hand comprises: a base plate for which the gripping position is prescribed, expanding to the tip end side from the base end side fixed at the hand end part; an engaging claw provided on the tip end side of the base plate, the engaging claw being able to engage with an edge lower than the center of the substrate in the perpendicular or inclined attitude; a moving part that moves facing the tip end side farther to the base end side than the gripping position; and a plurality of rotators provided at the tip end side of the moving part, the plurality of rotators pressing, by the movement of the moving part, the substrate up to the gripping position while rotating along the edge of the substrate by being pressed on the edge of the substrate in a state engaged with the engaging claw at a position below the gripping position.