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1. (WO2018143130) SUBSTRATE-GRIPPING HAND AND SUBSTRATE-CONVEYING DEVICE

Pub. No.:    WO/2018/143130    International Application No.:    PCT/JP2018/002766
Publication Date: Fri Aug 10 01:59:59 CEST 2018 International Filing Date: Tue Jan 30 00:59:59 CET 2018
IPC: H01L 21/677
B25J 15/08
B65G 49/07
Applicants: KAWASAKI JUKOGYO KABUSHIKI KAISHA
川崎重工業株式会社
Inventors: YOSHIDA, Tetsuya
吉田 哲也
KANAMARU, Ryosuke
金丸 亮介
KINOSHITA, Shinya
木下 真也
FUKUSHIMA, Takayuki
福島 崇行
Title: SUBSTRATE-GRIPPING HAND AND SUBSTRATE-CONVEYING DEVICE
Abstract:
A substrate-gripping hand mounted on a hand end part of a manipulator, the substrate-gripping hand gripping a round disk-shaped substrate that is in a perpendicular or inclined attitude, wherein the substrate-gripping hand comprises: a base plate for which the gripping position is prescribed, expanding to the tip end side from the base end side fixed at the hand end part; an engaging claw provided on the tip end side of the base plate, the engaging claw being able to engage with an edge lower than the center of the substrate in the perpendicular or inclined attitude; a moving part that moves facing the tip end side farther to the base end side than the gripping position; and a plurality of rotators provided at the tip end side of the moving part, the plurality of rotators pressing, by the movement of the moving part, the substrate up to the gripping position while rotating along the edge of the substrate by being pressed on the edge of the substrate in a state engaged with the engaging claw at a position below the gripping position.