Some content of this application is unavailable at the moment.
If this situation persist, please contact us atFeedback&Contact
1. (WO2018142647) SUBSTRATE INSPECTION DEVICE
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.: WO/2018/142647 International Application No.: PCT/JP2017/027399
Publication Date: 09.08.2018 International Filing Date: 28.07.2017
IPC:
H05K 13/02 (2006.01) ,G01N 21/956 (2006.01)
H ELECTRICITY
05
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
K
PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
13
Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
02
Feeding of components
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
84
Systems specially adapted for particular applications
88
Investigating the presence of flaws, defects or contamination
95
characterised by the material or shape of the object to be examined
956
Inspecting patterns on the surface of objects
Applicants:
CKD株式会社 CKD CORPORATION [JP/JP]; 愛知県小牧市応時二丁目250番地 250, Ouji 2-chome, Komaki-shi, Aichi 4858551, JP
Inventors:
梅村 信行 UMEMURA Nobuyuki; JP
Agent:
川口光男 KAWAGUCHI Mitsuo; JP
Priority Data:
2017-01496331.01.2017JP
Title (EN) SUBSTRATE INSPECTION DEVICE
(FR) DISPOSITIF D'INSPECTION DE SUBSTRAT
(JA) 基板検査装置
Abstract:
(EN) Provided is a substrate inspection device with which it is possible to improve the reliability of inspection of substrates and determine the suitability of rail width to a high degree of accuracy, etc. The substrate inspection device 1 is provided with: guide rails 51, 52, 53, 54 having height reference surfaces 51e, 52e, 53e, 54e; and inspection cameras 91, 92 for imaging a substrate positioned in the height direction. The positioning in the height direction is performed by pressing a width-direction end part of the substrate against the height reference surfaces 51e, 52e, 53e, 54e from below. The substrate inspection device 1 has reference parts 51g, 52g, 53g, 54g provided to the guide rails 51, 52, 53, 54, and the position of the guide rails 51, 52, 53, 54 is detected on the basis of imaging data relating to the reference parts 51g, 52g, 53g, 54g. The reference parts 51g, 52g, 53g, 54g are at the same height as the height reference surfaces 51e, 52e, 53e, 54e.
(FR) L'invention concerne un dispositif d'inspection de substrat avec lequel il est possible d'améliorer la fiabilité d'inspection de substrats et de déterminer le caractère approprié d'une largeur de rail à un degré élevé de précision, etc. Le dispositif d'inspection de substrat 1 comporte : des rails de guidage 51, 52, 53, 54 ayant des surfaces de référence de hauteur 51e, 52e, 53e, 54e ; et des caméras d'inspection 91, 92 pour imager un substrat positionné dans la direction de la hauteur. Le positionnement dans la direction de la hauteur est effectué par pression d'une partie d'extrémité de direction de la largeur du substrat contre les surfaces de référence de hauteur 51e, 52e, 53e, 54e par le dessous. Le dispositif d'inspection de substrat 1 comporte des parties de référence 51g, 52g, 53g, 54g disposées sur les rails de guidage 51, 52, 53, 54, et la position des rails de guidage 51, 52, 53, 54 est détectée sur la base de données d'imagerie relatives aux parties de référence 51g, 52g, 53g, 54g. Les parties de référence 51g, 52g, 53g, 54g sont à la même hauteur que les surfaces de référence de hauteur 51e, 52e, 53e, 54e.
(JA) 基板の検査に係る信頼性の向上や高精度でのレール幅の適否判定などが可能となる基板検査装置を提供する。基板検査装置1は、高さ基準面51e,52e,53e,54eを有するガイドレール51,52,53,54と、高さ方向の位置決めがなされた基板を撮像する検査用カメラ91,92とを備える。高さ方向の位置決めは、基板の幅方向端部が高さ基準面51e,52e,53e,54eに対し下方から押付けられることで行われる。基板検査装置1は、ガイドレール51,52,53,54に設けられた基準部51g,52g,53g,54gを有し、基準部51g,52g,53g,54gに係る撮像データに基づき、ガイドレール51,52,53,54の位置が検出される。基準部51g,52g,53g,54gは、高さ基準面51e,52e,53e,54eと同じ高さとされる。
front page image
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)