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1. (WO2018142052) STRUCTURE FOR A RADIO FREQUENCY APPLICATION

Pub. No.:    WO/2018/142052    International Application No.:    PCT/FR2018/050196
Publication Date: Fri Aug 10 01:59:59 CEST 2018 International Filing Date: Tue Jan 30 00:59:59 CET 2018
IPC: H01L 21/762
H01L 29/786
Applicants: SOITEC
Inventors: DESBONNETS, Eric
ASPAR, Bernard
Title: STRUCTURE FOR A RADIO FREQUENCY APPLICATION
Abstract:
The invention relates to a structure (100) for a radiofrequency application comprising: a high-resistivity support substrate (1) having a front face (1a) defining a main plane, a charge-trapping layer (2) disposed on the front face (1a) of the support substrate (1), a first dielectric layer (3) disposed on the trapping layer (2), an active layer (4) disposed on the first dielectric layer (3), the structure (100) being characterised in that it comprises at least one buried electrode (10) disposed above or in the trapping layer (2), the electrode (10) comprising a conductive layer (11) and a second dielectric layer (13).