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1. WO2018141917 - METHOD FOR DIMENSIONAL X-RAY MEASUREMENT, IN PARTICULAR BY COMPUTED TOMOGRAPHY, AND X-RAY COMPUTED TOMOGRAPHY SCANNER

Publication Number WO/2018/141917
Publication Date 09.08.2018
International Application No. PCT/EP2018/052686
International Filing Date 02.02.2018
IPC
G06T 5/00 2006.1
GPHYSICS
06COMPUTING; CALCULATING OR COUNTING
TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
5Image enhancement or restoration
G06T 11/00 2006.1
GPHYSICS
06COMPUTING; CALCULATING OR COUNTING
TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
112D image generation
CPC
A61B 6/582
AHUMAN NECESSITIES
61MEDICAL OR VETERINARY SCIENCE; HYGIENE
BDIAGNOSIS; SURGERY; IDENTIFICATION
6Apparatus for radiation diagnosis, e.g. combined with radiation therapy equipment
58Testing, adjusting or calibrating apparatus or devices for radiation diagnosis
582Calibration
G01N 2223/3306
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
2223Investigating materials by wave or particle radiation
30Accessories, mechanical or electrical features
33scanning, i.e. relative motion for measurement of successive object-parts
3306object rotates
G01N 23/046
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
23Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00G01N17/00, G01N21/00 or G01N22/00
02by transmitting the radiation through the material
04and forming images of the material
046using tomography, e.g. computed tomography [CT]
G06T 11/005
GPHYSICS
06COMPUTING; CALCULATING; COUNTING
TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
112D [Two Dimensional] image generation
003Reconstruction from projections, e.g. tomography
005Specific pre-processing for tomographic reconstruction, e.g. calibration, source positioning, rebinning, scatter correction, retrospective gating
G06T 2207/10081
GPHYSICS
06COMPUTING; CALCULATING; COUNTING
TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
2207Indexing scheme for image analysis or image enhancement
10Image acquisition modality
10072Tomographic images
10081Computed x-ray tomography [CT]
G06T 2207/30108
GPHYSICS
06COMPUTING; CALCULATING; COUNTING
TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
2207Indexing scheme for image analysis or image enhancement
30Subject of image; Context of image processing
30108Industrial image inspection
Applicants
  • BUNDESREPUBLIK DEUTSCHLAND, vertreten durch das BUNDESMINISTERIUM FÜR WIRTSCHAFT UND ENERGIE, dieses vertreten durch den PRÄSIDENTEN DER PHYSIKALISCH-TECHNISCHEN BUNDESANSTALT [DE]/[DE]
Inventors
  • ILLEMANN, Jens
  • BARTSCHER, Markus
Agents
  • GRAMM, LINS & PARTNER PATENT- UND RECHTSANWÄLTE PARTGMBB
Priority Data
10 2017 102 254.606.02.2017DE
Publication Language German (de)
Filing Language German (DE)
Designated States
Title
(DE) VERFAHREN ZUM DIMENSIONELLEN RÖNTGENOGRAPHISCHEN MESSEN, INSBESONDERE MITTELS COMPUTERTOMOGRAPHIE, UND RÖNTGEN-COMPUTERTOMOGRAPH
(EN) METHOD FOR DIMENSIONAL X-RAY MEASUREMENT, IN PARTICULAR BY COMPUTED TOMOGRAPHY, AND X-RAY COMPUTED TOMOGRAPHY SCANNER
(FR) PROCÉDÉ DE MESURE DIMENSIONNELLE PAR RAYONS X, EN PARTICULIER PAR TOMODENSITOMÉTRIE ET TOMODENSITOMÈTRE À RAYONS X
Abstract
(DE) Die Erfindung betrifft ein Verfahren zum dimensioneilen röntgenographischen Messen, insbesondere mittels Computertomographie, mit den Schritten (a) Bestrahlen eines Prüflings (26) mit nicht-monochromatischer Röntgenstrahlung einer quasi-punktförmigen Röntgenquelle (12), (b) Messen von Intensität (I) der Röntgenstrahlung (22) im Strahlungspfad hinter dem Prüfling (26) mittels eines Detektors (14), der eine Vielzahl an Pixeln (P) aufweist, sodass pixelabhängige Intensitätsdaten (l(P)) erhalten werden, und (c) Berechnen zumindest einer Abmessung (H) des Prüflings (26) anhand der pixelabhängigen Intensitätsdaten (l(P)). Erfindungsgemäß ist vorgesehen, dass die pixelabhängigen Intensitätsdaten (l(P)) um den Einfluss einer effektiven Eindringtiefe (τ) auf dem Detektor (14) und/oder einer Verschiebung des effektiven Quellorts (Q) auf einem Target (20) der Röntgenquelle (12) korrigiert werden.
(EN) The invention relates to a method for dimensional x-ray measurement, in particular by computed tomography, having the steps (a) irradiating a test object (26) with non-monochromatic x-ray radiation from a virtually punctiform x-ray source (12), (b) measuring the intensity (I) of the x-ray radiation (22) in the radiation path behind the test object (26) by means of a detector (14) which has a plurality of pixels (P) to obtain pixel-dependent intensity data (I(P)), and (c) calculating at least one dimension (H) of the test object (26) using the pixel-dependent intensity data (I(P)). According to the invention, the pixel-dependent intensity data (I(P)) are corrected by the influence of an effective penetration depth (τ) on the detector (14) and/or of a displacement of the effective source location (Q) on a target (20) of the x-ray source (12).
(FR) La présente invention concerne un procédé de mesure dimensionnelle par rayons X, en particulier par tomodensitométrie, comprenant les étapes consistant à : (a) irradier un objet d'essai (26) par des rayons X non-monochromatiques d'une source de rayons X (12) en forme de quasi-point ; (b) mesurer l'intensité (I) des rayons X (22) dans le trajet du rayonnement derrière l'objet d'essai (26) au moyen d'un détecteur (14), lequel comporte une pluralité de pixels (P), de telle sorte que les données d'intensité dépendant du pixel (l (P)) sont obtenus ; et (c) calculer au moins une dimension (H) de l'objet d'essai (26) à l'aide des données d'intensité dépendant du pixel (I(P)). Selon l'invention, les données d'intensité dépendant du pixel (l(p)) sont corrigées en fonction de l'influence d'une profondeur de pénétration (τ) effective sur le détecteur (14) et/ou d'un déplacement de l'emplacement de la source (Q) effectif par rapport à une cible (20) de la source de rayons X (12).
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