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1. (WO2018141339) METHOD FOR SECURING A BONDING PRODUCT IN A WORKING REGION OF A BONDER

Pub. No.:    WO/2018/141339    International Application No.:    PCT/DE2018/100090
Publication Date: Fri Aug 10 01:59:59 CEST 2018 International Filing Date: Tue Feb 06 00:59:59 CET 2018
IPC: H01L 23/544
H01L 23/00
Applicants: HESSE GMBH
Inventors: HESSE, Hans-Jürgen
BELTING, Gregor
RIESE, Markus
Title: METHOD FOR SECURING A BONDING PRODUCT IN A WORKING REGION OF A BONDER
Abstract:
The invention relates to a method for securing a bonding product (1) in a working region of a bonder by means of a clamping device (6), comprising an initialization routine comprising the following steps: the bonding product (1) and the clamping device (6) are placed in the working region of the bonder; for the purpose of determining the position of the bonding product (1) in the working area, a characteristic (partial) contour as bonding product (1) and/or a bonding product positioning marker (5), which is provided on the bonding product (1), are/is detected by means of the camera and stored as bonding product reference markers; on the basis of the bonding product reference markers (5), the position and/or orientation of the bonding product (1) relative to the bonder is determined; clamping fingers (9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20) of the clamping device (6) are moved to a clamping position and clamping faces which are provided on the clamping fingers (9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20) of the clamping device (6) are placed against the bonding product (1) in such a way that, in a subsequent working step, a connection contact can be established at predetermined connection faces of the bonding product (1), without the bonding product (1) being impermissibly caused to vibrate and/or there being a collision with the clamping device (6) when a bonding tool of the bonder is moved and/or positioned; the previously set clamping position of the clamping fingers (9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20) is detected by means of the camera, and the clamping position relative to the position and/or orientation of the bonding product (1) is calculated as desired clamping finger position and stored; and also a transfer routine comprising the following steps: the bonding product (1) and the clamping device (6) with the clamping fingers (9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20) are positioned in the working region of the bonder; a current position and orientation of the bonding product (1) and/or of the clamping device (6) are detected by means of the camera; on the basis of the current position and orientation of the bonding product (1) and of the clamping device (6) and on the basis of the stored desired clamping finger position, an initial faulty position of the clamping fingers (9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20) is calculated and displayed; the current position and orientation of the clamping fingers (9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20) are iteratively corrected and detected once again and a new faulty position of the clamping fingers (9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20) is calculated and displayed until the current position and orientation of the clamping fingers (9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20) corresponds to the desired clamping finger position.