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1. (WO2018140810) WIDEBAND SPECTROGRAPH
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Pub. No.: WO/2018/140810 International Application No.: PCT/US2018/015575
Publication Date: 02.08.2018 International Filing Date: 26.01.2018
IPC:
G01N 21/33 (2006.01)
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
17
Systems in which incident light is modified in accordance with the properties of the material investigated
25
Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
31
Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
33
using ultra-violet light
Applicants:
KLA-TENCOR CORPORATION [US/US]; Legal Department One Technology Drive Milpitas, California 95035, US
Inventors:
GROSS, Kenneth P; US
Agent:
MCANDREWS, Kevin; US
MORRIS, Elizabeth M. N.; US
Priority Data:
15/485,09711.04.2017US
62/451,58227.01.2017US
Title (EN) WIDEBAND SPECTROGRAPH
(FR) SPECTROGRAPHE À LARGE BANDE
Abstract:
(EN) A wideband spectrograph apparatus includes a first spectrograph assembly and one or more subsequent spectrograph assemblies. Each subsequent spectrograph assembly is optically coupled to a previous spectrograph assembly and is configured to receive a cascading beam from one or more dispersion elements of the previous spectrograph assembly. The first spectrograph assembly is configured for detecting illumination in a first wavelength range and the one or more subsequent spectrograph assemblies are configured for detecting illumination in wavelength ranges different from the first or any previous wavelength ranges to provide simultaneous sampling of different spectral portions of an input beam.
(FR) L'invention concerne un appareil spectrographe à large bande comprenant un premier ensemble spectrographe et un ou plusieurs ensembles spectrographe suivants. Chaque ensemble spectrographe suivant est couplé optiquement à un ensemble spectrographe précédent et est conçu pour recevoir un faisceau en cascade en provenance d'un ou plusieurs éléments de dispersion de l'ensemble spectrographe précédent. Le premier ensemble spectrographe est conçu pour détecter un éclairage dans une première plage de longueurs d'onde et lesdits ensembles spectrographe suivants sont conçus pour détecter un éclairage dans des plages de longueurs d'onde différentes de la première ou de toute plage de longueurs d'onde précédente afin de fournir un échantillonnage simultané de différentes parties spectrales d'un faisceau d'entrée.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)