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1. (WO2018140769) METHOD AND APPARATUS FOR SUBSTRATE TRANSPORT APPARATUS POSITION COMPENSATION
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Pub. No.: WO/2018/140769 International Application No.: PCT/US2018/015512
Publication Date: 02.08.2018 International Filing Date: 26.01.2018
IPC:
H01L 21/677 (2006.01) ,B25J 9/00 (2006.01) ,B25J 9/02 (2006.01) ,B25J 9/06 (2006.01) ,B25J 11/00 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
677
for conveying, e.g. between different work stations
B PERFORMING OPERATIONS; TRANSPORTING
25
HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; HANDLES FOR HAND IMPLEMENTS; WORKSHOP EQUIPMENT; MANIPULATORS
J
MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
9
Programme-controlled manipulators
B PERFORMING OPERATIONS; TRANSPORTING
25
HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; HANDLES FOR HAND IMPLEMENTS; WORKSHOP EQUIPMENT; MANIPULATORS
J
MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
9
Programme-controlled manipulators
02
characterised by movement of the arms, e.g. cartesian co-ordinate type
B PERFORMING OPERATIONS; TRANSPORTING
25
HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; HANDLES FOR HAND IMPLEMENTS; WORKSHOP EQUIPMENT; MANIPULATORS
J
MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
9
Programme-controlled manipulators
06
characterised by multi-articulated arms
B PERFORMING OPERATIONS; TRANSPORTING
25
HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; HANDLES FOR HAND IMPLEMENTS; WORKSHOP EQUIPMENT; MANIPULATORS
J
MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
11
Manipulators not otherwise provided for
Applicants: BROOKS AUTOMATION, INC.[US/US]; 15 Elizabeth Drive Chelmsford, MA 01824, US
Inventors: MOURA, Jairo T.; US
CAVENEY, Robert T.; US
YING, Bing; US
SPIKER, Nathan; US
TSANG, Vincent W.; US
Agent: MARCOVICI, Janik; Perman & Green, LLP 99 Hawley Lane Stratford, CT 01664, US
Priority Data:
15/880,38725.01.2018US
62/450,81826.01.2017US
Title (EN) METHOD AND APPARATUS FOR SUBSTRATE TRANSPORT APPARATUS POSITION COMPENSATION
(FR) PROCÉDÉ ET APPAREIL DE COMPENSATION DE POSITION D'APPAREIL DE TRANSPORT DE SUBSTRAT
Abstract:
(EN) A substrate transport empiric arm droop mapping apparatus for a substrate transport system of a processing tool, the mapping apparatus including: a frame, an interface disposed on the frame forming datum features representative of a substrate transport space in the processing tool defined by the substrate transport system, a substrate transport arm, that is articulated and has a substrate holder, mounted to the frame in a predetermined relation to at least one of the datum features, and a registration system disposed with respect to the substrate transport arm and at least one datum feature so that the registration system registers, in an arm droop distance register, empiric arm droop distance, due to arm droop changes, between a first arm position and a second arm position different than the first arm position and in which the substrate holder is moved in the transport space along at least one axis of motion.
(FR) Un appareil de mise en correspondance de chute de bras empirique de transport de substrat pour un système de transport de substrat d'un outil de traitement, l'appareil de mise en correspondance comprenant : un cadre, une interface disposée sur le cadre formant des éléments de référence représentant un espace de transport de substrat dans l'outil de traitement défini par le système de transport de substrat, un bras de transport de substrat, qui est articulé et a un support de substrat, monté sur le cadre dans une relation prédéterminée par rapport à au moins l'un des éléments de référence, et un système d'enregistrement disposé par rapport au bras de transport de substrat et au moins un élément de référence de telle sorte que le système d'enregistrement enregistre, dans un registre de distance de chute de bras, une distance de chute de bras empirique, en raison de changements de chute de bras, entre une première position de bras et une seconde position de bras différente de la première position de bras et dans laquelle le support de substrat est déplacé dans l'espace de transport le long d'au moins un axe de mouvement.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)