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1. (WO2018140696) GAS SENSOR AND METHOD OF OPTIMIZING AN ARRAY OF GAS SENSORS
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What is Claimed is:

1. A gas sensor (100,200) comprising:

at least one sensor device including a surface acoustic wave (SAW) device (110) or a quartz crystal microbalance (QCM) device (210); and

a layer of metal organic framework (MOF) material (120,220) disposed on each of the at least one sensor device,

wherein the at least one sensor device is structured to sense a change in mass of the MOF material.

2. The gas sensor of claim 1, wherein the metal organic framework includes at least one of IRMOF-1, HKUST-1, NU-125, UiO-66, and ZIF-8.

3. The gas sensor of claim 1, wherein the sensor device includes the SAW device (110), and wherein the layer of MOF material (120) has a thickness within a range of about 100-300 nm.

4. The gas sensor of claim 1, wherein the sensor device incudes the QCM device (210), and wherein the layer of MOF material (220) has a thickness within a range of about 100-300 nm.

5. The gas sensor of claim 1, wherein the at least one sensor device is a plurality of sensor devices arranged in an array.

6. The gas sensor of claim 5, wherein the plurality of sensor devices includes a first sensor device having a first layer of MOF material disposed thereon and a second sensor device having a second layer of MOF material disposed thereon, wherein the first MOF material and the second MOF material are different.

7. The gas sensor of claim 5, wherein the plurality of sensor devices includes a first sensor device having a first layer of MOF material composed of FD UST-1, a second sensor device having a second layer of MOF material composed of UiO-66, and a third sensor device having a third layer of material composed of ZIF-8.

8. The gas sensor of claim 5, wherein the plurality of sensor devices includes a first sensor device having a first layer of MOF material composed of IRMOF-1, a second sensor device having a second layer of MOF material composed of FKUST-1, a third sensor device having a third layer of MOF material composed of UiO-66, a fourth sensor device having a fourth layer of MOF material composed of ZIG-8, and a fifth sensor device having a fifth layer of MOF material composed on MgMOF-75.

9. A method of optimizing an array of gas sensors each including a sensor device having a layer of MOF material disposed thereon, wherein the sensor device is structured to sense a change in mass of the MOF material, the method comprising:

selecting a plurality of gas mixtures;

selecting a plurality of MOF materials;

selecting a plurality of array sizes, the array size being the number of gas sensors in the array;

generating a set of potential arrays from the plurality of MOF materials and the plurality of array sizes, wherein each of the gas sensors in a selected potential array includes a different type of MOF material;

simulating adsorption characteristics of each of the MOF materials for each of the gas mixtures;

calculating an effectiveness score for each of the potential arrays; and selecting one or more of the potential arrays based on the calculated effectiveness scores.

10. The method of claim 9, wherein calculating the effectiveness score for each of the potential arrays comprises:

calculating a sensor array gas space (SAGS) score Φ for each of the potential arrays based on the following equation:


where W is a total number of combinations of pairs of gas mixtures selected from the plurality of gas mixtures and where 5i;- is a pairwise array score based on the following equation:

where is the Euclidean distance between two different gas mixtures, i and j, selected from the plurality of gas mixtures, each with N component gases, specified by their mole fraction, xk, based on the following equation:


and rriij is the Euclidean distance between mass changes in an M element MOF array adsorbing either gas mixture i or gas mixture j based on the following equation:


1 1. The method of claim 10, further comprising:

using the SAGS score as the effectiveness score;

selecting the potential array with the highest effectiveness score; and fabricating the selected potential array.

12. The method of claim 9, wherein the plurality of gas mixtures are selected by selecting a plurality of gas components and varying each of the gas components in concentrations from 0-1 mole fractions in a predetermined step size to generate the plurality of gas mixtures, and

wherein calculating the effectiveness score for each of the potential arrays comprises:

selecting a subset of the plurality of gas mixtures;

simulating adsorption characteristics of each of the MOF materials for each gas mixture in the subset of the plurality of gas mixtures;

for each of the MOF materials and each of the subset of the plurality of gas mixtures, calculating a probability distribution of the gas mixture from the subset of the plurality of gas mixtures being selected gas mixtures from the plurality of gas mixtures;

for each of the potential arrays, combining the probability distributions for each of the MOF materials in the potential array; and

calculating a Kullback-Liebler divergence (KLD) for each gas mixtures in the subset of the plurality of gas mixtures for each of the potential arrays using the following equation:


where a probability at each mole fraction is represented by Ph and a reference probability of Q, is a probability equivalent to UN, where N is the

predetermined step size divided by 1.

13. The method of claim 12, further comprising:

calculating an average KLD by taking the average of the KLD calculated for each of the gas mixtures in the subset of the plurality of gas mixtures.

The method of claim 13, further comprising:

using the calculated average KLD as the effectiveness score; selecting the potential array with the highest effectiveness score;

fabricating the selected potential array.

15. The method of claim 12, wherein the subset of gas mixtures includes a single gas mixture, wherein the method further comprises:

using the calculated KLD as the effectiveness score;

selecting the potential array with the highest effectiveness score; and fabricating the selected potential array.

16. A method of converting an output of a gas sensor or an array of gas sensors, the method comprising:

selecting a number of gas mixtures;

selecting a number of MOF materials;

simulating adsorption characteristics of each of the MOF materials for each of the gas mixtures;

receiving output from a gas sensor or an array of gas sensors; and calculating a probability distribution of the output of the gas sensor or array of gas sensors corresponding to selected gas mixtures from the plurality of gas mixtures based on the simulated adsorption characteristics.