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1. (WO2018140260) SEGMENTED TUBES USED IN ANNEALING OF HIGH PURITY SILICON GRANULES

Pub. No.:    WO/2018/140260    International Application No.:    PCT/US2018/013891
Publication Date: Fri Aug 03 01:59:59 CEST 2018 International Filing Date: Wed Jan 17 00:59:59 CET 2018
IPC: B01J 6/00
B01J 19/00
C01B 33/02
Applicants: REC SILICON INC
Inventors: MILLER, Matthew, J.
GEERTSEN, Robert, J.
JULSRUD, Stein
YILMAZ, Sefa
DESBORDES, Raymond
Title: SEGMENTED TUBES USED IN ANNEALING OF HIGH PURITY SILICON GRANULES
Abstract:
This disclosure concerns embodiments of an annealing device and a method for annealing granular silicon to reduce a hydrogen content of the granular silicon. The annealing device comprises at least one tube through which granular silicon is flowed downwardly. The tube includes a heating zone and (i) a residence zone below the heating zone, (ii) a cooling zone below the heating zone, or (iii) a residence zone below the heating zone and a cooling zone below the residence zone. An inert gas is flowed upwardly through the tube. The tube may be constructed from two or more tube segments. The annealing device may include a plurality of tubes arranged in parallel and housed within a shell. The annealing device and method are suitable for a continuous process.