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1. (WO2018139746) METHOD FOR PREPARING HIGH-QUALITY QUADRUPLE-PATTERNING MATERIAL THROUGH ALLOYING OF HETERO ELEMENTS

Pub. No.:    WO/2018/139746    International Application No.:    PCT/KR2017/013109
Publication Date: Fri Aug 03 01:59:59 CEST 2018 International Filing Date: Sat Nov 18 00:59:59 CET 2017
IPC: H01L 21/027
C23C 16/40
C23C 16/455
C23C 16/56
H01L 21/02
H01L 21/28
Applicants: INCHEON UNIVERSITY INDUSTRY ACADEMIC COOPERATION FOUNDATION
인천대학교 산학협력단
Inventors: LEE, Han Bo Ram
이한보람
Title: METHOD FOR PREPARING HIGH-QUALITY QUADRUPLE-PATTERNING MATERIAL THROUGH ALLOYING OF HETERO ELEMENTS
Abstract:
The present invention relates to a method for preparing a high-quality quadruple-patterning material through the alloying of hetero elements and, more specifically, to a method capable of providing a high-quality quadruple-patterning material by resolving the problem of an increase in surface roughness, caused by a subsequent heat treatment process of a conventional titanium oxide (TiO2) thin film, by using supercycle atomic layer deposition (ALD) so as to dope yttrium oxide (Y2O3) in titanium oxide (TiO2) and alloy the same.