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1. (WO2018139612) COMPONENT-MANUFACTURING FILM, COMPONENT-MANUFACTURING TOOL, AND COMPONENT-MANUFACTURING METHOD

Pub. No.:    WO/2018/139612    International Application No.:    PCT/JP2018/002585
Publication Date: Fri Aug 03 01:59:59 CEST 2018 International Filing Date: Sat Jan 27 00:59:59 CET 2018
IPC: H01L 21/683
B32B 15/08
B32B 27/00
B32B 27/36
C09J 7/20
H01L 21/301
Applicants: MITSUI CHEMICALS TOHCELLO, INC.
三井化学東セロ株式会社
Inventors: HAYASHISHITA Eiji
林下 英司
TAKAHASHI Hirokazu
高橋 宏和
FUKURA Kazuhide
福良 和秀
Title: COMPONENT-MANUFACTURING FILM, COMPONENT-MANUFACTURING TOOL, AND COMPONENT-MANUFACTURING METHOD
Abstract:
The purpose of the present invention is to provide a component-manufacturing film, a component-manufacturing tool, and a component-manufacturing method with which reliable chucking to a chuck table is possible in a heated environment while providing versatility in which shared use in different steps is possible. To address the above: this film 1 has a first region S1 and a second region S2 disposed so as to surround the region S1; the region S1 is formed from a base layer 11 and an adhesive layer 12 provided on one surface side of the base layer 11; the region S2 is formed from the base layer 11, the adhesive layer 12, and an additional layer 13 affixed onto the layer 12. In the temperature range of 190°C or below, the tensile modulus of elasticity of the additional layer 13 is equal to or greater than the tensile modulus of elasticity of the base layer 11. The present method has a component fixing step, a film placement step for performing placement so that the boundary between the region S1 and the region S2 is located on the inner side of the edge of the chuck table, a chucking step, and a heating step.