Processing

Please wait...

Settings

Settings

Goto Application

1. WO2018139274 - POLARIZED LIGHT RADIATION DEVICE AND POLARIZED LIGHT RADIATION METHOD

Publication Number WO/2018/139274
Publication Date 02.08.2018
International Application No. PCT/JP2018/001071
International Filing Date 16.01.2018
IPC
G03F 7/20 2006.01
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
20Exposure; Apparatus therefor
G02F 1/1337 2006.01
GPHYSICS
02OPTICS
FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
1Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
01for the control of the intensity, phase, polarisation or colour
13based on liquid crystals, e.g. single liquid crystal display cells
133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
1333Constructional arrangements
1337Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
CPC
G02F 1/1303
GPHYSICS
02OPTICS
FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
1Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics
01for the control of the intensity, phase, polarisation or colour 
13based on liquid crystals, e.g. single liquid crystal display cells
1303Apparatus specially adapted to the manufacture of LCDs
G02F 1/133788
GPHYSICS
02OPTICS
FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
1Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics
01for the control of the intensity, phase, polarisation or colour 
13based on liquid crystals, e.g. single liquid crystal display cells
133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
1333Constructional arrangements; ; Manufacturing methods
1337Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
13378by treatment of the surface, e.g. embossing, rubbing, light irradiation
133788by light irradiation, e.g. linearly polarised light photo-polymerisation
G03F 7/20
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR;
7Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
20Exposure; Apparatus therefor
G03F 7/70141
GPHYSICS
03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR;
7Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
70Exposure apparatus for microlithography
70058Mask illumination systems
70141Illumination system adjustment, alignment during assembly of illumination system
Applicants
  • 株式会社ブイ・テクノロジー V TECHNOLOGY CO., LTD. [JP]/[JP]
Inventors
  • 新井 敏成 ARAI Toshinari
  • 竹下 琢郎 TAKESHITA Takuro
Agents
  • 坂田 ゆかり SAKATA Yukari
Priority Data
2017-01179726.01.2017JP
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) POLARIZED LIGHT RADIATION DEVICE AND POLARIZED LIGHT RADIATION METHOD
(FR) DISPOSITIF DE RAYONNEMENT LUMINEUX POLARISÉ ET PROCÉDÉ DE RAYONNEMENT LUMINEUX POLARISÉ
(JA) 偏光光照射装置及び偏光光照射方法
Abstract
(EN)
An alignment film that causes the pretilt angle of liquid crystal molecules to be small can be produced by a photoalignment process. Polarized light emitted from a light source (211) and transmitted through a light transmission region formed in a mask (32) is radiated onto an object (W) to be exposed resting on a stage (11). The polarized light is radiated onto the object (W) to be exposed from a direction inclined approximately 50-70 degrees in relation to the direction approximately orthogonal to the upper surface of the stage (11).
(FR)
La présente invention concerne un film d'alignement qui amène l'angle de pré-inclinaison de molécules de cristaux liquides à être petit, et qui peut être produit par un processus de photo-alignement. La lumière polarisée émise par une source de lumière (211) et transmise à travers une région de transmission de lumière formée dans un masque (32) est émise sur un objet (W) à exposer reposant sur un support (11). La lumière polarisée est émise sur l'objet (W) à exposer à partir d'une direction inclinée d'environ 50 à 70 degrés par rapport à la direction approximativement orthogonale à la surface supérieure du support (11).
(JA)
光配向処理により、液晶分子のプレチルト角が小さくなるような配向膜を生成することができる。 光源(211)から出射され、マスク(32)に形成された光透過領域を透過した偏光光は、ステージ(11)に載置された露光対象物(W)に照射される。偏光光は、ステージ(11)の上面と略直交する方向に対して、略50度から略70度傾いた方向から露光対象物(W)へ照射される。
Also published as
Latest bibliographic data on file with the International Bureau