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1. (WO2018139274) POLARIZED LIGHT RADIATION DEVICE AND POLARIZED LIGHT RADIATION METHOD

Pub. No.:    WO/2018/139274    International Application No.:    PCT/JP2018/001071
Publication Date: Fri Aug 03 01:59:59 CEST 2018 International Filing Date: Wed Jan 17 00:59:59 CET 2018
IPC: G03F 7/20
G02F 1/1337
Applicants: V TECHNOLOGY CO., LTD.
株式会社ブイ・テクノロジー
Inventors: ARAI Toshinari
新井 敏成
TAKESHITA Takuro
竹下 琢郎
Title: POLARIZED LIGHT RADIATION DEVICE AND POLARIZED LIGHT RADIATION METHOD
Abstract:
An alignment film that causes the pretilt angle of liquid crystal molecules to be small can be produced by a photoalignment process. Polarized light emitted from a light source (211) and transmitted through a light transmission region formed in a mask (32) is radiated onto an object (W) to be exposed resting on a stage (11). The polarized light is radiated onto the object (W) to be exposed from a direction inclined approximately 50-70 degrees in relation to the direction approximately orthogonal to the upper surface of the stage (11).