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1. (WO2018139011) FLUID HEATING DEVICE

Pub. No.:    WO/2018/139011    International Application No.:    PCT/JP2017/040878
Publication Date: Fri Aug 03 01:59:59 CEST 2018 International Filing Date: Wed Nov 15 00:59:59 CET 2017
IPC: F24H 1/18
H01L 21/304
Applicants: KELK LTD.
株式会社KELK
Inventors: MIMURA Kazuhiro
三村 和弘
Title: FLUID HEATING DEVICE
Abstract:
The present invention is provided with: a tank (3) that stores fluid; a pump (4) that feeds the fluid inside the tank (3); a heater (5) that heats the fed fluid to a predetermined temperature; a return pipe (15) that returns the heated fluid to the tank (3); a fluid supplying valve (6) that supplies the fluid that has not been heated, to the inside of the tank (3); a fluid discharging valve (7) that discharges the heated fluid inside the tank (3); a temperature sensor (9) that detects the temperature of the heated fluid; and a temperature control device (20) that controls the degrees of opening of the fluid supplying valve (6) and the fluid discharging valve (7) to control the temperature of the fluid inside the tank (3). The temperature control device (20) is provided with: a discharge degree-of-opening control unit that controls the degree of opening of the fluid discharging valve (7) on the basis of the temperature detected by the temperature sensor (9); and a supply degree-of-opening control unit that controls the degree of opening of the fluid supplying valve on the basis of the temperature detected by the temperature sensor (9).