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1. (WO2018138824) VAPOR DEPOSITION MASK, METHOD FOR PRODUCING VAPOR DEPOSITION MASK, AND METHOD FOR PRODUCING ORGANIC EL DISPLAY DEVICE

Pub. No.:    WO/2018/138824    International Application No.:    PCT/JP2017/002693
Publication Date: Fri Aug 03 01:59:59 CEST 2018 International Filing Date: Fri Jan 27 00:59:59 CET 2017
IPC: C23C 14/24
Applicants: SHARP KABUSHIKI KAISHA
シャープ株式会社
Inventors: KAWATO, Shinichi
川戸 伸一
NIBOSHI, Manabu
二星 学
KOIKE, Eiji
小池 英士
INOUE, Satoshi
井上 智
INOUE, Tsuyoshi
井上 毅
KOBAYASHI, Yuhki
小林 勇毅
Title: VAPOR DEPOSITION MASK, METHOD FOR PRODUCING VAPOR DEPOSITION MASK, AND METHOD FOR PRODUCING ORGANIC EL DISPLAY DEVICE
Abstract:
Provided is a vapor deposition mask (1) which includes a metallic substrate (2) provided with a plurality of openings (4) through which vapor deposition particles can pass, wherein the plurality of openings (4) are configured as a plurality of opening groups in which the openings (4) are repeatedly disposed according to certain rules, and a plurality of protruding sections (5) of the same height are disposed so as to be able to support the entire substrate (2) from one side and are provided only outside of opening group formation regions (3).