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1. (WO2018138138) METHOD AND DEVICE FOR SENSING THE SURFACE STRUCTURE AND THE NATURE OF A SAMPLE
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Pub. No.: WO/2018/138138 International Application No.: PCT/EP2018/051712
Publication Date: 02.08.2018 International Filing Date: 24.01.2018
IPC:
G01B 11/02 (2006.01) ,G01S 17/02 (2006.01) ,G01S 17/89 (2006.01) ,G01B 11/24 (2006.01) ,G01N 21/31 (2006.01) ,G01N 21/3563 (2014.01) ,G01S 7/48 (2006.01) ,G01N 21/47 (2006.01)
G PHYSICS
01
MEASURING; TESTING
B
MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11
Measuring arrangements characterised by the use of optical means
02
for measuring length, width, or thickness
G PHYSICS
01
MEASURING; TESTING
S
RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
17
Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
02
Systems using the reflection of electromagnetic waves other than radio waves
G PHYSICS
01
MEASURING; TESTING
S
RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
17
Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
88
Lidar systems, specially adapted for specific applications
89
for mapping or imaging
G PHYSICS
01
MEASURING; TESTING
B
MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11
Measuring arrangements characterised by the use of optical means
24
for measuring contours or curvatures
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
17
Systems in which incident light is modified in accordance with the properties of the material investigated
25
Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
31
Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
[IPC code unknown for G01N 21/3563]
G PHYSICS
01
MEASURING; TESTING
S
RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
7
Details of systems according to groups G01S13/, G01S15/, G01S17/127
48
of systems according to group G01S17/58
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
17
Systems in which incident light is modified in accordance with the properties of the material investigated
47
Scattering, i.e. diffuse reflection
Applicants:
MARX, Juergen [DE/DE]; DE
Inventors:
MARX, Juergen; DE
EBERL, Heinrich Alexander; DE
RAEDLE, Matthias; DE
TEUMER, Tobias; DE
DOERNHOFER, Patrick; DE
Agent:
MAIKOWSKI & NINNEMANN PATENTANWÄLTE PARTNERSCHAFT MBB; Postfach 15 09 20 10671 Berlin, DE
Priority Data:
10 2017 201 362.127.01.2017DE
Title (EN) METHOD AND DEVICE FOR SENSING THE SURFACE STRUCTURE AND THE NATURE OF A SAMPLE
(FR) PROCÉDÉ ET DISPOSITIF DE DÉTECTION DE STRUCTURE SUPERFICIELLE ET D'ÉTAT D'UN ÉCHANTILLON
(DE) VERFAHREN UND VORRICHTUNG ZUR ERFASSUNG DER OBERFLÄCHENSTRUKTUR UND BESCHAFFENHEIT EINER PROBE
Abstract:
(EN) The invention relates to a method for sensing the surface structure and nature of a sample (P) by means of a sensor (21, 22), in particular for sensing chemical substances on and in the surface of the sample (P), wherein the sample (P) and the sensor (21, 22) are moved relative to one another, and wherein a) the sensor emits light (L 1, L 2) with at least two different characteristics, in particular two different wavelengths (λ 1, λ 2) and/or different phase positions, wherein in particular the wavelength (λ 1) of the first light (L 1) lies in the absorption region and/or the phase position lies in the contrast region of the sample (P), and in particular wavelengths (λ 1, λ 2) are used which correspond to the wavelength range of the absorption spectrum of the nature of the surface of the sample (P), in particular of a chemical substance (S) to be sensed, b) the light (R 1, R 2) reflected by the surface of the sample (P) is sensed and from deviations of the reflected light (R 1, R 2) from the emitted light (L 1, L 2) two digital images of the topography of the surface of the sample (P) and the intensity of the reflected light (R 1, R 2) are produced. The invention further relates to a device for carrying out said method.
(FR) L'invention concerne un procédé de détection de structure superficielle et d'état d'un échantillon (P) au moyen d'un dispositif de balayage (21, 22), en particulier pour détecter des substances chimiques sur et dans la surface de l'échantillon (P), l'échantillon (P) et le dispositif de balayage (21, 22) étant déplacés l'un par rapport à l'autre et : a) le dispositif de balayage émettant une lumière (L11, L2) comportant au moins deux propriétés différentes, en particulier deux longueurs d'onde différentes (λ1, λ2) et/ou des angles de phase différents, en particulier les longueurs d'onde (λ1) de la première lumière (L1) se trouvant dans la zone d'absorption et/ou les positions de phase se trouvant dans la zone de contraste de l'échantillon (P) et en particulier les longueurs d'onde (λ1, λ2) étant utilisés, lesquelles correspondent à la zone de longueur d'onde du spectre d'absorption de l'état de la surface de l'échantillon (P), en particulier d'une substance chimique (S) à détecter ; b) la lumière (R1, R2) réfléchie de la surface de l'échantillon (P) étant détectée et, à partir des écarts entre la lumière (R1, R2) réfléchie et la lumière (L1, L2) émise, deux images numériques de la topographie de surface de l'échantillon (P) et de l'intensité de lumière (R1, R2) réfléchie étant générées. L'invention concerne en outre un dispositif de mise en œuvre dudit procédé.
(DE) Offenbart wird ein Verfahren zur Erfassung der Oberflächenstruktur und Beschaffenheit einer Probe (P) mittels einer Abtasteinrichtung (21, 22), insbesondere zur Erfassung chemischer Substanzen auf und in der Oberfläche der Probe (P), wobei die Probe (P) und die Abtasteinrichtung (21, 22) relativ zueinander bewegt werden, und wobei a) die Abtasteinrichtung Licht (L 1, L 2) mit mindestens zwei unterschiedliche Eigenschaften, insbesondere zwei unterschiedliche Wellenlängen (λ 1, λ 2) und / oder unterschiedliche Phasenlagen abstrahlt, wobei insbesondere die Wellenlänge (λ 1) des ersten Lichts (L 1) im Absorptionsbereich und / oder die Phasenlage im Kontrastbereich der Probe (P) liegen, und insbesondere Wellenlängen (λ 1, λ 2) verwendet werden, die dem Wellenlängenbereich des Absorptionsspektrums der Beschaffenheit der Oberfläche der Probe (P), insbesondere einer zu erfassenden chemischen Substanz (S), entsprechen, b) das von der Oberfläche der Probe (P) reflektierte Licht (R 1, R 2) erfasst und aus Abweichungen des reflektierten Lichts (R 1, R 2) von dem abgegebenen Licht (L 1, L 2) zwei digitale Bilder der Topographie der Oberfläche der Probe (P) und der Intensität des reflektierten Lichts (R 1, R 2) erzeugt werden. Offenbart wird auch eine Vorrichtung zur Durchführung dieses Verfahrens.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: German (DE)
Filing Language: German (DE)