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1. (WO2018138123) METHODS OF TUNING PROCESS MODELS

Pub. No.:    WO/2018/138123    International Application No.:    PCT/EP2018/051669
Publication Date: Fri Aug 03 01:59:59 CEST 2018 International Filing Date: Thu Jan 25 00:59:59 CET 2018
IPC: G03F 7/20
Applicants: ASML NETHERLANDS B.V.
Inventors: FENG, Mu
SHAYEGAN SALEK, Mir Farrokh
ZHU, Dianwen
ZHENG, Leiwu
HOWELL, Rafael C.
WANG, Jen-Shiang
Title: METHODS OF TUNING PROCESS MODELS
Abstract:
Disclosed herein are methods of constructing a process model for simulating a characteristic of a product of lithography from patterns produced under different processing conditions. The methods use a deviation between the variation of the simulated characteristic and the variation of the measured characteristic to adjust the parameters of the process model.