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1. WO2018138098 - MICRO-SPECTROMETRY MEASUREMENT METHOD AND SYSTEM

Publication Number WO/2018/138098
Publication Date 02.08.2018
International Application No. PCT/EP2018/051608
International Filing Date 23.01.2018
IPC
G02B 21/36 2006.1
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
21Microscopes
36arranged for photographic purposes or projection purposes
G01J 3/28 2006.1
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
28Investigating the spectrum
G01J 3/02 2006.1
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
02Details
G01J 3/44 2006.1
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
28Investigating the spectrum
44Raman spectrometry; Scattering spectrometry
G02B 21/00 2006.1
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
21Microscopes
G02B 21/24 2006.1
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
21Microscopes
24Base structure
CPC
G01J 3/027
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
02Details
027Control of working procedures of a spectrometer; Failure detection; Bandwidth calculation
G01J 3/2823
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
28Investigating the spectrum
2823Imaging spectrometer
G01J 3/44
GPHYSICS
01MEASURING; TESTING
JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3Spectrometry; Spectrophotometry; Monochromators; Measuring colours
28Investigating the spectrum
44Raman spectrometry; Scattering spectrometry ; ; Fluorescence spectrometry
G02B 21/002
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
21Microscopes
0004specially adapted for specific applications
002Scanning microscopes
G02B 21/0036
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
21Microscopes
0004specially adapted for specific applications
002Scanning microscopes
0024Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
0036Scanning details, e.g. scanning stages
G02B 21/006
GPHYSICS
02OPTICS
BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
21Microscopes
0004specially adapted for specific applications
002Scanning microscopes
0024Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
0052Optical details of the image generation
006focusing arrangements; selection of the plane to be imaged
Applicants
  • HORIBA FRANCE SAS [FR]/[FR]
Inventors
  • KOKOTA, Alexandre
  • SHYNKAR, Vasyl
  • MARCHESSOUX, Cédric
Agents
  • CHAUVIN, Vincent
  • LE CACHEUX, Samuel
  • ORSINI, Fabienne
  • BLAYO, Nadine
  • BONNANS, Arnaud
  • DE CACQUERAY-VALMENIER, Stanislas
  • CANUEL, Clélia
  • CATHERINE, Alain
  • DEVIC, David
  • LE BIHAN, Jean-Michel
  • LIENARD, Céline
Priority Data
17305076.624.01.2017EP
Publication Language English (en)
Filing Language English (EN)
Designated States
Title
(EN) MICRO-SPECTROMETRY MEASUREMENT METHOD AND SYSTEM
(FR) PROCÉDÉ ET SYSTÈME DE MESURE PAR MICRO-SPECTROMÉTRIE
Abstract
(EN) The invention concerns an optical micro-spectrometry system comprising an optical microscope (10), a spectrometry system (50) and an optical system (14) adapted to direct an excitation light beam on the sample through said at least one microscope objective (11, 12) and to collect a Raman or PL light beam from a sample. According to the invention, the optical micro-spectrometry system comprises an imaging system (16, 41) configured for acquiring a first image (71) and a second image (72) of the sample, by reflection or transmission of an illumination beam from a sample surface, the first image (71) having a large field of view and the second image (72) having a small field of view, a processing system (40) configured for determining an area in the first image (71) corresponding to the second image (72), a display system (44) configured for displaying the first image (71), the second image (72), and a third image (73) representing said area in overlay on the first image (71).
(FR) L'invention concerne un système de micro-spectrométrie optique comprenant un microscope optique (10), un système de spectrométrie (50) et un système optique (14) conçu pour diriger un faisceau de lumière d'excitation sur l'échantillon à travers ledit au moins un objectif de microscope (11, 12) et pour recueillir un faisceau lumineux à effet Raman ou photoluminescent provenant d'un échantillon. Selon l'invention, le système de micro-spectrométrie optique comporte un système d'imagerie (16, 41) configuré pour l'acquisition d'une première image (71) et d'une seconde image (72) de l'échantillon, par réflexion ou transmission d'un faisceau d'éclairage provenant d'une surface d'échantillon, la première image (71) ayant un grand champ de vision et la seconde image (72) ayant un petit champ de vision, un système de traitement (40) configuré pour la détermination d'une zone dans la première image (71) correspondant à la seconde image (72), un système d'affichage (44) configuré pour l'affichage de la première image (71), de la deuxième image (72), et d'une troisième image (73) représentant ladite zone en superposition sur la première image (71).
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