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1. (WO2018137676) SHUTTER DEVICE AND CONTROL METHOD THEREFOR, MASK ALIGNER AND EXPOSURE DOSE CONTROL METHOD THEREFOR

Pub. No.:    WO/2018/137676    International Application No.:    PCT/CN2018/074089
Publication Date: Fri Aug 03 01:59:59 CEST 2018 International Filing Date: Fri Jan 26 00:59:59 CET 2018
IPC: G03B 9/08
G03F 7/20
Applicants: SHANGHAI MICRO ELECTRONICS EQUIPMENT(GROUP) CO., LTD.
上海微电子装备(集团)股份有限公司
Inventors: JIANG, Zhiyong
蒋志勇
ZHANG, Fuping
章富平
WANG, Yanfei
王彦飞
Title: SHUTTER DEVICE AND CONTROL METHOD THEREFOR, MASK ALIGNER AND EXPOSURE DOSE CONTROL METHOD THEREFOR
Abstract:
Disclosed are a shutter device and a control method therefor, a mask aligner and an exposure dose control method therefor. The shutter device comprises: a light blocking unit and a voice coil electric motor (100), wherein the voice coil electric motor (100) comprises a permanent magnet module (110), a drive guide rail module (120) and coil structures (130). The coil structures (130) are arranged on the drive guide rail module (120). The permanent magnet module (110) generates a magnetic field inside the drive guide rail module (120). The light blocking unit comprises two shutter blades (200). The shutter blades (200) are connected to the coil structures (130). After being energised, the coil structures (130) generate magnetic fields the opposite of or the same as the magnetic field in the drive guide rail module (120), so that the coil structures (130) move forwards or reversely along the drive guide rail module (120) to drive the opening or closing of the two shutter blades (200). By means of directly connecting the coil structures (130) of the voice coil electric motor (100) to the light blocking unit, the opening and closing time of the shutter blades (200) is greatly reduced, thus increasing a small-dose exposure yield and increasing the light source utilisation rate in unit time.