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|1. (WO2018137673) GALLIUM OXIDE-DOPED CRYSTALLINE MATERIAL, PREPARATION METHOD AND APPLICATION THEREOF|
|Applicants:||SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS CHINESE ACADEMY OF SCIENCES
|Title:||GALLIUM OXIDE-DOPED CRYSTALLINE MATERIAL, PREPARATION METHOD AND APPLICATION THEREOF|
The invention discloses a VB group element doped with a β-gallium oxide crystalline material, and a preparation method and application thereof. The series doped with the β-Ga2O3 crystalline material is monoclinic, the space group is C2/m, the resistivity is in the range of 2.0×10-4 to 1×104 Ω·cm, and/or the carrier concentration is in the range of 5×1012 to 7×1020 / cm3. The preparation method comprises steps of: mixing M2O5 and Ga2O3 with a purity of 4N or more at a molar ratio of (0.000000001-0.01):(0.999999999-0.99); and then performing crystal growth. The invention can prepare a high-conductivity β-Ga2O3 crystalline material with n-type conductivity characteristics by conventional processes, providing a basis for applications thereof to electrically powered electronic devices, optoelectronic devices, photocatalysts or conductive substrates.