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1. (WO2018137328) EVAPORATION MASK PLATE, AND MANUFACTURING METHOD AND EVAPORATION METHOD THEREFOR

Pub. No.:    WO/2018/137328    International Application No.:    PCT/CN2017/095740
Publication Date: Fri Aug 03 01:59:59 CEST 2018 International Filing Date: Fri Aug 04 01:59:59 CEST 2017
IPC: H01L 51/56
H01L 27/32
C23C 14/04
C23C 14/12
C23C 14/24
Applicants: BOE TECHNOLOGY GROUP CO., LTD.
京东方科技集团股份有限公司
CHENGDU BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
成都京东方光电科技有限公司
Inventors: YUAN, Hongguang
袁洪光
CHUN, Pilgeun
千必根
HU, Yan
胡岩
Title: EVAPORATION MASK PLATE, AND MANUFACTURING METHOD AND EVAPORATION METHOD THEREFOR
Abstract:
An evaporation mask plate (100), and a manufacturing method and an evaporation method therefor. The evaporation mask plate (100) comprises a body (101), evaporation opening areas (102) formed on the body (101), and a shielding part (103) provided on the body (101). The shielding part (103) is provided between adjacent evaporation opening areas (102).