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1. (WO2018137275) MEMS MICROPHONE

Pub. No.:    WO/2018/137275    International Application No.:    PCT/CN2017/075592
Publication Date: Fri Aug 03 01:59:59 CEST 2018 International Filing Date: Sat Mar 04 00:59:59 CET 2017
IPC: H04R 19/04
Applicants: GOERTEK. INC
Inventors: ZHAN, Junkai
LI, Jun
CAI, Mengjin
Disclosed is an MEMS microphone, comprising a substrate having a back cavity; the substrate is provided with a plate capacitor structure constituted by a vibrating diaphragm, a back electrode, and a support portion; a pressure relief device is provided on the vibrating diaphragm, a pressure maintaining channel is formed between the vibrating diaphragm and the back electrode, and the pressure relief device on the vibrating diaphragm forms an entrance of the pressure maintaining channel. According to the microphone of the present invention, the air pressure entering the pressure maintaining channel fights against the instantaneous impact force to the exterior of the vibrating diaphragm to obtain dynamic balance therebetween, and therefore, the impact force to the vibrating diaphragm can be buffered well. By means of the pressure relief approach in such structure, there is no need to provide excessive pressure relief designs on the vibrating diaphragm, ensuring the reliability of the vibrating diaphragm.