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1. (WO2018136335) ELECTROSTATIC CHUCK WITH RADIO FREQUENCY ISOLATED HEATERS

Pub. No.:    WO/2018/136335    International Application No.:    PCT/US2018/013631
Publication Date: Fri Jul 27 01:59:59 CEST 2018 International Filing Date: Sat Jan 13 00:59:59 CET 2018
IPC: H01L 21/67
H01L 21/683
Applicants: APPLIED MATERIALS, INC.
Inventors: BENJAMINSON, David
SCHATZ, Ken
LUBOMIRSKY, Dmitry
Title: ELECTROSTATIC CHUCK WITH RADIO FREQUENCY ISOLATED HEATERS
Abstract:
A heater assembly for a substrate support assembly includes a flexible body. The heater assembly further includes one or more resistive heating elements disposed in the flexible body. The heater assembly further includes a first metal layer disposed on the top surface of the flexible body and extending at least partially onto an outer sidewall of the flexible body. The heater assembly further includes a second metal layer disposed on a bottom surface of the flexible body and extending at least partially onto the outer sidewall of the flexible body, wherein the second metal layer is coupled to the first metal layer at the outer sidewall of the flexible body such that the first metal layer and the second metal layer enclose, and form a continuous electrically conductive path around, the outer sidewall of the flexible body.