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1. WO2018135412 - VACUUM PUMP DEVICE, AND PUMP MAIN BODY UNIT, CONTROL UNIT AND SPACER USED IN VACUUM PUMP DEVICE

Publication Number WO/2018/135412
Publication Date 26.07.2018
International Application No. PCT/JP2018/000698
International Filing Date 12.01.2018
IPC
F04B 39/00 2006.01
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
39Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/-F04B37/225
F04B 37/16 2006.01
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
37Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/-F04B35/187
10for special use
14to obtain high vacuum
16Means for nullifying unswept space
F04D 19/04 2006.01
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
DNON-POSITIVE-DISPLACEMENT PUMPS
19Axial-flow pumps specially adapted for elastic fluids
02Multi-stage pumps
04specially adapted to the production of a high vacuum, e.g. molecular pumps
F04D 29/64 2006.01
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
DNON-POSITIVE-DISPLACEMENT PUMPS
29Details, component parts, or accessories
60Mounting; Assembling; Disassembling
64of axial pumps
H05K 5/02 2006.01
HELECTRICITY
05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
5Casings, cabinets or drawers for electric apparatus
02Details
CPC
F04B 17/03
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
17Pumps characterised by combination with, or adaptation to, specific driving engines or motors
03driven by electric motors
F04B 2203/0208
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
2203Motor parameters
02of rotating electric motors
0208Power
F04B 37/14
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
37Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
10for special use
14to obtain high vacuum
F04B 37/16
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
37Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
10for special use
14to obtain high vacuum
16Means for nullifying unswept space
F04B 39/00
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
39Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
F04D 19/04
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
DNON-POSITIVE-DISPLACEMENT PUMPS
19Axial-flow pumps
02Multi-stage pumps
04specially adapted to the production of a high vacuum, e.g. molecular pumps
Applicants
  • エドワーズ株式会社 EDWARDS JAPAN LIMITED [JP]/[JP]
Inventors
  • 坂口 祐幸 SAKAGUCHI Yoshiyuki
  • 孫 彦斌 SUN Yanbin
  • 三枝 健吾 SAEGUSA Kengo
  • 大森 秀樹 OMORI Hideki
Priority Data
2017-00827520.01.2017JP
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) VACUUM PUMP DEVICE, AND PUMP MAIN BODY UNIT, CONTROL UNIT AND SPACER USED IN VACUUM PUMP DEVICE
(FR) DISPOSITIF DE POMPE À VIDE ET UNITÉ DE CORPS PRINCIPAL DE POMPE, UNITÉ DE COMMANDE ET ÉLÉMENT D'ESPACEMENT UTILISÉ DANS UN DISPOSITIF DE POMPE À VIDE
(JA) 真空ポンプ装置、及び該真空ポンプ装置に用いられるポンプ本体ユニット、制御ユニット、並びにスペーサ
Abstract
(EN)
[Problem] The present invention addresses the problem of providing a vacuum pump device, whereby the thickness, weight, and size of a vacuum pump control device can be reduced, and cost can be reduced. [Solution] A vacuum pump device (10) is formed by integrating with each other a pump main body unit (11) and a control unit (12) that controls drive of the pump main body unit (11). The vacuum pump device is configured such that a spacer (13), which supports a load applied to a housing (22) of the control unit (12), is provided between a base (15) of the pump main body unit (11), and the housing (22) of the control unit (12).
(FR)
La présente invention concerne un dispositif de pompe à vide permettant de réduire l'épaisseur, le poids et la taille d'un dispositif de commande de pompe à vide, et permettant de réduire le coût. Plus précisément, l'invention concerne un dispositif de pompe à vide (10) qui est formé par l'intégration mutuelle d'une unité de corps principal de pompe (11) et d'une unité de commande (12) qui commande l'entraînement de l'unité de corps principal de pompe (11). Le dispositif de pompe à vide est configuré de telle sorte qu'un élément d'espacement (13), qui supporte une charge appliquée à un boîtier (22) de l'unité de commande (12), est disposé entre une base (15) de l'unité de corps principal de pompe (11), et le boîtier (22) de l'unité de commande (12).
(JA)
【課題】真空ポンプ制御装置の薄形・軽量化とコンパクト化、並びにコストの低減を可能にする真空ポンプ装置を提供する。 【解決手段】ポンプ本体ユニット(11)とポンプ本体ユニット(11)の駆動を制御する制御ユニット(12)を一体化した真空ポンプ装置(10)であって、制御ユニットユニット(12)の筐体(22)に加わる荷重を支えるスペーサ(13)を、ポンプ本体ユニット(11)のベース(15)と制御ユニット(12)の筐体(22)との間に備える構成とした。
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