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1. WO2018135232 - FOREIGN MATTER DETECTION DEVICE, FOREIGN MATTER DETECTION METHOD AND MANUFACTURING DEVICE

Publication Number WO/2018/135232
Publication Date 26.07.2018
International Application No. PCT/JP2017/045967
International Filing Date 21.12.2017
IPC
G01N 21/85 2006.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
84Systems specially adapted for particular applications
85Investigating moving fluids or granular solids
G01N 21/3563 2014.01
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
35using infra-red light
3563for analysing solids; Preparation of samples therefor
CPC
G01N 21/3563
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
35using infra-red light
3563for analysing solids; Preparation of samples therefor
G01N 21/85
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
84Systems specially adapted for particular applications
85Investigating moving fluids or granular solids
Applicants
  • シャープ株式会社 SHARP KABUSHIKI KAISHA [JP]/[JP]
  • 株式会社PS&T PS&T CO., LTD. [JP]/[JP]
Inventors
  • 松田 京子 MATSUDA, Kyohko
  • 榊原 裕介 SAKAKIBARA, Yusuke
  • 和泉 真 IZUMI, Makoto
  • 森 豪 MORI, Go
  • 綿野 哲 WATANO, Satoru
Agents
  • 特許業務法人深見特許事務所 FUKAMI PATENT OFFICE, P.C.
Priority Data
2017-00583917.01.2017JP
Publication Language Japanese (JA)
Filing Language Japanese (JA)
Designated States
Title
(EN) FOREIGN MATTER DETECTION DEVICE, FOREIGN MATTER DETECTION METHOD AND MANUFACTURING DEVICE
(FR) DISPOSITIF D’INSPECTION DE SUBSTANCE ÉTRANGÈRE, PROCÉDÉ D’INSPECTION DE SUBSTANCE ÉTRANGÈRE, ET DISPOSITIF DE FABRICATION
(JA) 異物検査装置、異物検査方法および製造装置
Abstract
(EN)
This foreign matter detection device (101) is provided with: a light source (6) for irradiating light so as to cover the entirety of multiple targets (1) held together; a detection unit (7) which receives together light emitted from the light source (6) that has passed through any of the multiple targets (1) and detects the spectrum thereof; a storage unit (9) for holding reference data (11); and a determination unit (10) which, on the basis of the reference data (11) and spectral data of the light detected by the determination unit (7), determines whether or not foreign matter is contained in any of the targets (1).
(FR)
Le dispositif d’inspection de substance étrangère (101) de l’invention est équipé : d’une source lumineuse (6) destinée à l’irradiation d’une lumière de manière à couvrir l’ensemble d’une pluralité d’objets conservée collectivement ; d’une partie détection (7) qui reçoit collectivement la lumière émise en sortie par la source lumineuse (6) et passée au travers de l’un des objets, et en détectant le spectre ; d'une partie mémoire (9) destinée à conserver des données de référence (11) ; et d'une partie jugement (10) qui juge si une substance étrangère est contenue ou non dans au moins un des objets (1) sur la base de données relatives au spectre de la lumière détectée par la partie détection (7) et des données de référence (11).
(JA)
異物検査装置(101)は、一括して保持された複数の対象物(1)の全体を被覆するように光を照射するための光源(6)と、光源(6)から出射して複数の対象物(1)のいずれかを透過した光を一括して受光してスペクトルを検出する検出部(7)と、基準データ(11)を保持するための記憶部(9)と、検出部(7)で検出された光のスペクトルのデータおよび基準データ(11)に基づいて複数の対象物(1)の少なくともいずれかに異物が含まれるか否かを判定する判定部(10)とを備える。
Also published as
Latest bibliographic data on file with the International Bureau