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1. (WO2018134837) MOLYBDENUM TRIOXIDE AND NANO SILICON CHIPS FOR ACETONE DETECTION

Pub. No.:    WO/2018/134837    International Application No.:    PCT/IN2017/050421
Publication Date: Fri Jul 27 01:59:59 CEST 2018 International Filing Date: Sat Sep 23 01:59:59 CEST 2017
IPC: G01N 27/12
G01N 33/497
A61B 5/097
Applicants: INDIAN INSTITUTE OF TECHNOLOGY DELHI
Inventors: DHANEKAR, Saakshi
DWIVEDI, Priyanka
DAS, Samaresh
Title: MOLYBDENUM TRIOXIDE AND NANO SILICON CHIPS FOR ACETONE DETECTION
Abstract:
The present invention relates to a sensor chip and more particularly to the sensor chip for detection of acetone. In one embodiment, the sensor chip comprising:a first layer havinga nano-porous silicon fabricated on a P-type Si <100> substrate, a second layer having molybdenum trioxide (MoO3) in contact with the first layer and a third layer having chrome gold inter digitated electrodes in contact with the second layer.